A Simple Algorithm for the Reconstruction of Surface Topography from Makyoh-Topography Images

Lukács, István Endre; Riesz, Ferenc

doi:10.1002/1521-4079(200110)36:8/10<1059::aid-crat1059>3.0.co;2-v

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“…It was established that, in spite of the simple optical scheme, the reverse problem of the analytic reconstruction of the surface topography from the measured image is not possible in the general case. 16 There have been attempts for iterative solutions using either the geometrical 17 and wave optical 14 models, but these methods either restricted in applications, or require enormous computation time and have stringent instrumental requirements. A way of circumvent the problem of quantitativity is to apply structured illumination, 16 most purposefully by inserting a grid mask into the path of the illuminating beam.…”

Section: Introductionmentioning

confidence: 99%

Realisation of quantitative Makyoh topography using a digital micromirror device

2007

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Makyoh topography (MT) is an optical characterisation tool for flatness testing of mirror-like surfaces. In MT, the surface is illuminated by a collimated light beam, and the reflected image is detected on a screen placed some distance away from the sample. Because of the focussing/defocussing action of the surface undulaations, the image shows intensity variations related to the sample morphology. In its original form, MT is qualitative only. By inserting a structured mask (e.g., a grid) into the path of the illuminating beam, the surface topography can be calculated by the integration of the gradients obtained by the determination of the displacements of the grid node positions, compared to a reference flat, similarly to a wavefront sensor. A DMD provides an easy and verstile way of realisation of such a structured mask. In this paper, we report on a quantitative MT set-up using a programmed DMD. Possibilities of the realisation of different mask patterns are analysed. The results are compared to interferometry.

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Section: Introductionmentioning

confidence: 99%

Realisation of quantitative Makyoh topography using a digital micromirror device

2007

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A Simple Algorithm for the Reconstruction of Surface Topography from Makyoh-Topography Images

Abstract: A simple numerical algorithm, based on geometrical optics, is proposed for the reconstruction of surface topography from their Makyoh‐topography images. The method is tested on a simulated one‐dimensional model surface. Advantages and limitations of the method are discussed.

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References 5 publications

Realisation of quantitative Makyoh topography using a digital micromirror device

Realisation of quantitative Makyoh topography using a digital micromirror device

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