2022
DOI: 10.1109/jsen.2022.3211443
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A Simple 3-D Microelectrode Fabrication Process and Its Application in Microfluidic Impedance Cytometry

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Cited by 6 publications
(2 citation statements)
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“…(vi) The solidified PDMS and the glass with ITO electrodes were plasma cleaned and well bonded using a plasma machine (PDC-MG, PTL Technology Co, Ltd., Shenzhen China). Finally, the bonded MIC chip was placed on the heating plate for 30 min at 80 °C) [ 32 ]. The schematic diagram of the bonded MIC chip is shown in Figure 1 c.…”
Section: Methodsmentioning
confidence: 99%
“…(vi) The solidified PDMS and the glass with ITO electrodes were plasma cleaned and well bonded using a plasma machine (PDC-MG, PTL Technology Co, Ltd., Shenzhen China). Finally, the bonded MIC chip was placed on the heating plate for 30 min at 80 °C) [ 32 ]. The schematic diagram of the bonded MIC chip is shown in Figure 1 c.…”
Section: Methodsmentioning
confidence: 99%
“…40 Three-dimensional electrodes can generate a more uniform current density, which can promote the sensitivity and throughput of microfluidic impedance cytometers in the detection of cells. 40,41 To date, two types of three-dimensional electrodes have been developed, including facing electrode [43][44][45] and special three-dimensional electrode 46,47 configurations. Because facing electrodes can't thoroughly address the issues of nonuniform electric field and complicated fabrication, microfluidic impedance cytometers with such electrodes may not achieve the detection of microalgal cells in a sensitive and low-cost manner.…”
Section: Introductionmentioning
confidence: 99%