A silicon micromechanical galvanometric scanner

Ferreira, Luiz Otávio; Moehlecke, S.

doi:10.1016/s0924-4247(98)00288-x

Cited by 39 publications

(18 citation statements)

References 18 publications

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“…They consist of a small mirror suspended by torsional bars and that are driven by a magnetic field produced by a coil around it. 100,101 These devices are essentially a very small-scale version of galvanometric mirrors. A commercial microscope by Olympus has incorporated this technology with a single element MEMS measuring 4.2ϫ 3 mm and is used to perform horizontal scans.…”

Section: Other Approachesmentioning

confidence: 99%

Invited Review Article: Imaging techniques for harmonic and multiphoton absorption fluorescence microscopy

Carriles

Schafer²,

Sheetz³

et al. 2009

Review of Scientific Instruments

152

125

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We review the current state of multiphoton microscopy. In particular, the requirements and limitations associated with high-speed multiphoton imaging are considered. A description of the different scanning technologies such as line scan, multifoci approaches, multidepth microscopy, and novel detection techniques is given. The main nonlinear optical contrast mechanisms employed in microscopy are reviewed, namely, multiphoton excitation fluorescence, second harmonic generation, and third harmonic generation. Techniques for optimizing these nonlinear mechanisms through a careful measurement of the spatial and temporal characteristics of the focal volume are discussed, and a brief summary of photobleaching effects is provided. Finally, we consider three new applications of multiphoton microscopy: nonlinear imaging in microfluidics as applied to chemical analysis and the use of two-photon absorption and self-phase modulation as contrast mechanisms applied to imaging problems in the medical sciences.

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Section: Other Approachesmentioning

confidence: 99%

Invited Review Article: Imaging techniques for harmonic and multiphoton absorption fluorescence microscopy

Carriles

Schafer²,

Sheetz³

et al. 2009

Review of Scientific Instruments

152

125

View full text Add to dashboard Cite

show abstract

“…4). For mass production, a feedback-control circuit driver was employed to achieve high speeds with a precise motion for a rapid step-response, low tracing error and low thermal drift combined with an appropriate weighting factor on the damping ratio to achieve desired parameters (Ferreira and Moehlecke, 1999). …”

Section: Laser Focusing Systemmentioning

confidence: 99%

3D laser trimming technology for regulating embedded thick-film carbon resistors on a random access memory module

Tsai

2009

Journal of Materials Processing Technology

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“…The deflection angle velocities of these Galvo-scanners, and other mirror based scanners, such as piezo scanners (PI, 2014), and Micro-Electro-Mechanical Systems (MEMS) scanners (Piyawattanametha et al, 2005;Yalcinkaya et al, 2006;Ferreira and Moehlecke, 1999) are fundamentally limited by the inertia associated with the mass of the rotating mirror and other moving parts. Hence, to exploit the capabilities of high-pulse frequency laser sources, other high-speed beam deflection technologies have to be considered, which may be loosely grouped into two categories: mirror based mechanical deflectors and optical solid state deflectors, see Fig.…”

Section: Introductionmentioning

confidence: 99%

“…1. High-speed mirror based deflection technologies include rotating polygon wheel scanners (De Loor, 2013), and resonant scanners, such as resonant piezo scanners (PI, 2014), and resonant MEMS scanners (Piyawattanametha et al, 2005;Yalcinkaya et al, 2006;Ferreira and Moehlecke, 1999). The latter type of scanners achieve high beam deflection velocities and large deflection angles, by operating the mechanism, including the mirror, in its Eigenfrequency.…”

Section: Introductionmentioning

confidence: 99%

Electro-optic and Acousto-optic Laser Beam Scanners

2014

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Optical solid state deflectors rely on the electro-optical or acousto-optic effect. These Electro-Optical Deflectors (EODs) and Acousto-Optical Deflectors (AODs) do not contain moving parts and therefore exhibit high deflection velocities and are free of drawbacks associated with mechanical scanners. A description of the principles of operation of EODs and AODs is presented. In addition, characteristics, properties and the (dis)advantages of EODs and AODs, when compared to mirror based mechanical deflectors, is discussed. Deflection angles, speed and accuracy are discussed in terms of resolvable spots and related quantities. Also, response time, damage threshold, efficiency and the type and magnitude of beam distortions is addressed. Optical deflectors are characterized by high angular deflection velocities, but small deflection angles. Whereas mechanical mechanical scanners are characterized by relatively small deflection velocities, but large deflection angles. Arranging an optical deflector and a mechanical scanner in series allows to take advantage of the best of both worlds.

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A silicon micromechanical galvanometric scanner

Cited by 39 publications

References 18 publications

Invited Review Article: Imaging techniques for harmonic and multiphoton absorption fluorescence microscopy

Invited Review Article: Imaging techniques for harmonic and multiphoton absorption fluorescence microscopy

3D laser trimming technology for regulating embedded thick-film carbon resistors on a random access memory module

Electro-optic and Acousto-optic Laser Beam Scanners

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