1991
DOI: 10.1109/10.83588
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A silicon-based, three-dimensional neural interface: manufacturing processes for an intracortical electrode array

Abstract: A method has been developed for the manufacture of a "three-dimensional" electrode array geometry for chronic intracortical stimulation. This silicon based array consists of a 4.2 x 4.2 x 0.12 mm thick monocrystalline substrate, from which project 100 conductive, silicon needles sharpened to facilitate cortical penetration. Each needle is electrically isolated from the other needles, and is about 0.09 mm thick at its base and 1.5 mm long. The sharpened end of each needle is coated with platinum to facilitate c… Show more

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Cited by 746 publications
(471 citation statements)
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“…The NeuroPort electrode array, 1 mm in length, was placed in layers II/III of the middle temporal gyrus in all three patients. This array is silicon-based, made up of 96 microelectrodes with 400-μm spacing, covering an area of 4 × 4 mm (40). A total of four nights of natural sleep were examined (one night for two of the patients, two nights for the other patient).…”
Section: Methodsmentioning
confidence: 99%
“…The NeuroPort electrode array, 1 mm in length, was placed in layers II/III of the middle temporal gyrus in all three patients. This array is silicon-based, made up of 96 microelectrodes with 400-μm spacing, covering an area of 4 × 4 mm (40). A total of four nights of natural sleep were examined (one night for two of the patients, two nights for the other patient).…”
Section: Methodsmentioning
confidence: 99%
“…(Right) A scanning electron micrograph image of the Utah Slanted Electrode Array. Image reproduced from [50] The Utah Electrode Array (UEA) [51,52] has been used as a base for a number of modified systems and is extremely popular due to its reproducibility and high electrode density. A UAE is typically an array of 10 x 10 electrodes machined from a monocrystalline block of silicon.…”
Section: Michigan Probementioning
confidence: 99%
“…The "Michigan Probe" [5;6] and the "Utah Array" [7] are without doubt the best known penetrating electrode arrays. However, new arrays are under development, which also integrate microfluidic channels [8].…”
Section: Introductionmentioning
confidence: 99%