2006
DOI: 10.1088/0960-1317/16/10/014
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A silicon-based fuel cell micro power system using a microfabrication technique

Abstract: This paper reports a silicon-based polymer electrolyte membrane (PEM) fuel cell micro power system in which a high active surface area catalyst layer was monolithically integrated with the major components of the PEM fuel cell (gas diffusion layer, flow field, fuel reservoir and current collector). A sputtering method was used to apply the catalyst on a roughly textured substrate. A significant increase in the electro-active area by surface texturing was verified by the results of cyclic voltammetry (CV) measu… Show more

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Cited by 23 publications
(13 citation statements)
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“…Impressively, MEMs scale PEM fuel cells have been fabricated and tested for this purpose [18]. These systems integrate several components of a fuel cell power supply into a chip sized wafer, including the fuel and oxygen source.…”
Section: Pem Fuel Cell Applicationsmentioning
confidence: 99%
“…Impressively, MEMs scale PEM fuel cells have been fabricated and tested for this purpose [18]. These systems integrate several components of a fuel cell power supply into a chip sized wafer, including the fuel and oxygen source.…”
Section: Pem Fuel Cell Applicationsmentioning
confidence: 99%
“…Using silicon for the microfabrication of MFCs has two advantages: readily available mature microfabrication techniques, and the integration of the device with the rest of the microelectronic circuitry [2][3][4][5][6][7][8][9][10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…To achieve this result, numerous deposition steps of various thin films, in addition to the MWCNT growth, were required. Xiao et al [4] use lithographically defined 20 μm tall pillars etched in silicon, as a GDL, while Aravamudhan et al [5] and Lee et al [7] produced an array of holes in a silicon wafer, functioning as a macroporous diffusion layer. A similar kind of macroporous layer was implemented by Zhang, Advani et al [10] as an array of holes in a copper layer.…”
Section: Introductionmentioning
confidence: 99%
“…As a leading candidate power source for portable devices, direct methanol fuel cell (DMFC), especially micro-DMFC (DMFC), has drawn increasing attention recently due to its high energy density, easy recharging, low pollution and room temperature operation [1][2][3][4]. Most of the previous researches have focused on design and fabrication of DMFC to improve the performance.…”
Section: Introductionmentioning
confidence: 99%