A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

Wang, W.; Chen, J.; Živković, Aleksandar; Duan, Chuanxi; Xie, Huikai

doi:10.1109/transducers.2015.7180899

Cited by 11 publications

(17 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…All three bimorph segments are composed of Cu and W as the materials of the bilayers while the two frames are composed of a stack of However, with the range scaling up, the response time of the actuator is also increased greatly, up to hundreds of milliseconds [8,14]. In the previous reported Al/SiO 2 -based LSF bimorph actuator designs [8,9,14], Al and SiO 2 were employed to serve as the active layers of the bimorphs due to their large CTE difference. Joule heating was generated by a thin Pt layer acting as the embedded heater.…”

Section: Lsf Cu/w Bimorph Actuator Conceptmentioning

confidence: 99%

“…However, the thick silicon layer will bring large extra thermal capacitance for the LSF actuator, which leads to a slow thermal response of over 100 ms. This is particularly severe when long frames are needed to generate large vertical range [8,14]. As a result, the operation frequency of the scanning mirrors based on Al/SiO 2 LSF actuators is typically limited within 10 Hz to keep the large scan range [8].…”

Section: Lsf Cu/w Bimorph Actuator Conceptmentioning

confidence: 99%

“…Replacing thick Si frames with thin-film frames can greatly improve the thermal response from previous Al/SiO 2 LSF actuators [8,9,14]. In addition, the bimorph materials have been carefully selected.…”

Section: Thermal Responsementioning

confidence: 99%

“…Scan range, speed, driving voltage, power consumption and footprint are among the key parameters for MEMS scanning mirrors. In particular, MEMS-based FT spectrometers require vertical scanning of hundreds of micrometers for sufficient spectral resolution [2,8]. There are several actuation mechanisms to achieve vertical scans, including electrothermal [9,10], electrostatic [11,12], and piezoelectric [13].…”

Section: Introductionmentioning

confidence: 99%

“…Wu et al proposed a lateral-shift-free (LSF) electrothermal bimorph actuator design that can generate pure vertical displacement up to 1 mm [9] and several large-range MEMS mirrors with vertical scans over 600 µm based on this design have been reported [8,14]. The schematic of an LSF bimorph actuator is shown in Figure 1, which consists of three bimorph segments and two straight frames.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

2015

View full text Add to dashboard Cite

This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 µm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is˘18˝at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

show abstract

Section: Lsf Cu/w Bimorph Actuator Conceptmentioning

confidence: 99%

Section: Lsf Cu/w Bimorph Actuator Conceptmentioning

confidence: 99%

Section: Thermal Responsementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

2015

View full text Add to dashboard Cite

show abstract

A translation micromirror with large quasi-static displacement and high surface quality

He¹

2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

A large displacement with high surface quality translation micromirror is presented. The micromirror consists of a magnetic actuator and a mirror plate. The actuator and the mirror plate are fabricated separately using two processes and then bonded together. The actuator consists of a moving film which is a 20 µm thick nickel film fabricated by MetalMUMPs and a solenoid located underneath the moving film. The moving film is designed to curve up through the residual stress gradient in the nickel film and a curve-up mechanism which includes four trapezoidal plates and anchoring springs. The mirror plate is simply diced from a polished silicon wafer and coated with a metal thin film. The mirror plate is bonded onto the central ring of the moving film. A solenoid attracts the moving film along with the mirror plate downwards to realize translation. A quasi-static displacement of 123 µm is achieved at a driving current of 400 mA. A high mirror surface quality is realized, e.g. 15.6 m of curvature radius and 2 nm surface roughness.

show abstract

A repulsive magnetic force driven translation micromirror

Zuo

2017

J. Micromech. Microeng.

View full text Add to dashboard Cite

This paper presents a repulsive magnetic force driven micromirror with large displacement and high surface quality which well solves the limitation of the previous design, i.e. large variation in translation starting position and low repeatability, caused by the touching points between the moving film and substrate before and in operation. The new design utilizes a driving mechanism, i.e. permanent magnet ring above and electromagnet underneath the moving film, to lift the moving film from touching the substrate and generate a repulsive magnetic force (instead of attractive force in the previous design) to push the moving film up and away from the substrate for translation. Due to the touching, the previous design has to pre-oscillate for 20-30 min at 1 Hz before usage (after resting for a few hours) to reduce the starting position variation from ~15 µm to 3-4 µm. Even after the pre-oscillation, the repeatability is still low, which is 14.2% because of the touching in operation. In the design presented in this paper, the touching between the moving film and the substrate is completely eliminated before and in operation. As a result, the starting position of the translating mirror is constant each time and the repeatability is <1%. In addition, this design does not need the residual stress gradient to curve up the moving film. The maximum displacement of 144 µm can be achieved when 140 mA current is applied on the electromagnet. As an application, the micromirror is used as the movable mirror in a Michelson interferometer to measure the wavelength of a laser beam. The result shows a measurement accuracy of 2.19% for a 532 nm laser beam.

show abstract

A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror

Cited by 11 publications

References 6 publications

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

A translation micromirror with large quasi-static displacement and high surface quality

A repulsive magnetic force driven translation micromirror

Contact Info

Product

Resources

About