A-Si/SiO<sub>2</sub> nanolaminates for tuning the complex refractive index and band gap in optical interference coatings

Kreuzer, Karl; Farr, Philipp; Vergöhl, Michael; Bruns, Stefan; Melzig, Thomas; Patzig, Christian; Feder, René

doi:10.1364/ao.515083

Cited by 3 publications

References 27 publications

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Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

Thöny,

Bärtschi,

Batzer

et al. 2024

Advanced Photonics Research

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Quantization effects in nanolaminate structures of oxide materials are proposed and experimentally demonstrated only recently. Herein, the material combination of amorphous silicon and SiO2 deposited by magnetron sputtering is investigated and it is shown that the quantization effect can be observed indeed. Transmission electron microscopy characterization gives evidence of continuous layers of amorphous silicon and SiO2 with well‐defined interfaces. The deposition process is described and the tunability of the refractive index and the bandgap energy is demonstrated. By doing so, the advantages of this novel material over classical optical materials are shown and feasibility is proved. As an example, a longpass optical interference filter with edge at 720 nm is deposited using quantized nanolaminates as the high and SiO2 as the low refractive index material. This filter can be deposited successfully with close match to the design. It shows a blocking range throughout the visible spectrum whereas a comparable filter based on SiO2–TiO2 only blocks 500–700 nm.

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Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

Thöny,

Bärtschi,

Batzer

et al. 2024

Advanced Photonics Research

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Quantized nanolaminates: investigation of a novel type of meta materials deposited by magnetron sputtering

Schwyn Thoeny,

Bärtschi,

Batzer

et al. 2024

Advances in Optical Thin Films VIII

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The concept of quantum nanolaminates (QNL) postulates the decoupling of band gap and refractive index, which in regular dielectric materials is linked. We will show that the quantization effect can be observed in nanolaminate structures of the material combinations Ta2O5-SiO2 and amorphous silicon-SiO2, which were deposited by magnetron sputter deposition. These nanolaminates were characterized by a variety of different methods, which confirmed the layer structure in the nanometer range and the shift of the absorption edge to shorter wavelength. Furthermore, the use of the QNL as the high refractive index material in optical interference coatings was successfully demonstrated in anti-reflection and long pass filter coatings.

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A-Si/SiO₂ nanolaminates for tuning the complex refractive index and band gap in optical interference coatings: publisher’s note

Kreuzer,

Farr,

Vergohl

et al. 2024

Appl. Opt.

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A-Si/SiO₂ nanolaminates for tuning the complex refractive index and band gap in optical interference coatings

Cited by 3 publications

References 27 publications

Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

Quantized nanolaminates: investigation of a novel type of meta materials deposited by magnetron sputtering

A-Si/SiO₂ nanolaminates for tuning the complex refractive index and band gap in optical interference coatings: publisher’s note

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A-Si/SiO2 nanolaminates for tuning the complex refractive index and band gap in optical interference coatings

Cited by 3 publications

References 27 publications

Magnetron Sputter Deposition of Amorphous Silicon–SiO2 Quantized Nanolaminates

Magnetron Sputter Deposition of Amorphous Silicon–SiO2 Quantized Nanolaminates

Quantized nanolaminates: investigation of a novel type of meta materials deposited by magnetron sputtering

A-Si/SiO2 nanolaminates for tuning the complex refractive index and band gap in optical interference coatings: publisher’s note

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Resources

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A-Si/SiO₂ nanolaminates for tuning the complex refractive index and band gap in optical interference coatings

Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

Magnetron Sputter Deposition of Amorphous Silicon–SiO₂ Quantized Nanolaminates

A-Si/SiO₂ nanolaminates for tuning the complex refractive index and band gap in optical interference coatings: publisher’s note