A Sensitive Inexpensive SAW Sensor for Wide Range Humidity Measurement

Alam, Shamim; Islam, Tarikul; Mittal, Upendra

doi:10.1109/jsen.2019.2942521

Cited by 29 publications

(10 citation statements)

References 19 publications

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“…In addition to exploring polymers as humidity-sensitive materials, some researchers have presented the possibilities of improving the performance characteristics by altering the physical parameters of the sensing layer, such as thickness, densities, and mechanical adhesion [ 32 , 54 , 55 ]. In [ 31 ], the humidity tests for thinner and thicker PVP and PVA films coated SAW devices were investigated.…”

Section: Sensing Materialsmentioning

confidence: 99%

“…Moreover, they observed better measurement precision and lower hysteresis with the increase in the density of PVA film. Similarly, Alam et al [ 55 ] attempted to improve the dynamic range by varying film thickness using different PVA solutions (5%, 2%, and 1% solution). They showed that a wide dynamic range could be obtained with small mass loading by decreasing the thickness of the PVA film.…”

Section: Sensing Materialsmentioning

confidence: 99%

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Surface Acoustic Wave Humidity Sensor: A Review

et al. 2023

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The Growing demands for humidity detection in commercial and industrial applications led to the rapid development of humidity sensors based on different techniques. Surface acoustic wave (SAW) technology is one of these methods that has been found to provide a powerful platform for humidity sensing owing to its intrinsic features, including small size, high sensitivity, and simple operational mechanism. Similar to other techniques, the principle of humidity sensing in SAW devices is also realized by an overlaid sensitive film, which serves as the core element whose interaction with water molecules is responsible for overall performance. Therefore, most researchers are focused on exploring different sensing materials to achieve optimum performance characteristics. This article reviews sensing materials used to develop SAW humidity sensors and their responses based on theoretical aspects and experimental outcomes. Herein the influence of overlaid sensing film on the performance parameters of the SAW device, such as quality factor, signal amplitude, insertion loss, etc., is also highlighted. Lastly, a recommendation to minimize the significant change in device characteristics is presented, which we believe will be a good step for the future development of SAW humidity sensors.

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Section: Sensing Materialsmentioning

confidence: 99%

Section: Sensing Materialsmentioning

confidence: 99%

Surface Acoustic Wave Humidity Sensor: A Review

et al. 2023

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“…These include, for example, the following: using an artificial neural network to model and analyze the frequency-dependent performance of SAW resonators [ 13 ]; using the direct and reliable equivalent-circuit extraction method to evaluate the performance of commercial SAW resonators [ 14 ]; and using finite element analysis and the model of coupling of modes based on P-matrices to calculate and measure the frequency response of SAW devices [ 15 ]. SAW devices have been widely used in stress and strain sensors, temperature and humidity sensors, biochemical sensors and many other fields [ 16 , 17 , 18 , 19 , 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

Jiao

Wang

et al. 2023

Nanomaterials

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In recent years, with the rapid development of flexible electronic devices, researchers have a great interest in the research of electronic skin (e-skin). Traditional e-skin, which is made of rigid integrated circuit chips, not only limits the overall flexibility, but also consumes a lot of power and poses certain security risks to the human body. In this paper, a wireless passive e-skin is designed based on the surface acoustic wave sensor (SAWS) of lithium niobate piezoelectric film. The e-skin has the advantages of small size, high precision, low power consumption, and good flexibility. With the multi-sensing function of stress, temperature, and sweat ion concentration, etc., the newly designed e-skin is a sensor platform for a wide range of external stimuli, and the measurement results can be directly presented in frequency. In order to explore the characteristic parameters and various application scenarios of the SAWS, finite element analysis is carried out using the simulation software; the relationship between the SAWS and various influencing factors is explored, and the related performance curve is obtained. These simulation results provide important reference and experimental guidance for the design and preparation of SAW e-skin.

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“…Low sensitivity to external environmental factors can be achieved by optimizing the cutting shape of piezoelectric materials. At present, SAW devices have been widely used as temperature sensors, humidity sensors, chemistry sensors, acceleration sensors, biology, and torque sensors [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

Wang

et al. 2022

Sensors

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A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the advantages of fast propagation speed and high characteristic frequency. It is a very promising torque sensor, but there is very little related research. In order to successfully develop the sensor, it is essential to understand the propagation characteristics and torque sensing mode of SAW in multilayer structure. Therefore, in this study, we first established a multi-layered finite element analysis model of SAW device based on IDT/128° Y-X lithium niobate/diamond/Si (100). Then, the effects of different film thicknesses on the characteristic frequency, electromechanical coupling coefficient, s parameter, and mechanical quality factor of SAW device without changing the wavelength are analyzed. Then, based on the finite element analysis, a three-dimensional research model of a new SAW torque sensor suitable for small diameter torsion bar (d = 10 mm) is established, and the relationship between saw device deformation and torque under the condition of small torque (±40 Nm) is tested. The shape variable is introduced into the finite element analysis model of multi-layer SAW device. Finally, the relationship between saw torque sensor with multi-layer structure and torque is established by using the deformation relationship, which shows the perfect curve of sensor performance.

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A Sensitive Inexpensive SAW Sensor for Wide Range Humidity Measurement

Cited by 29 publications

References 19 publications

Surface Acoustic Wave Humidity Sensor: A Review

Surface Acoustic Wave Humidity Sensor: A Review

Finite Element Analysis Model of Electronic Skin Based on Surface Acoustic Wave Sensor

A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

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