1982
DOI: 10.1109/t-ed.1982.20721
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A SEM-EBIC minority-carrier diffusion-length measurement technique

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Cited by 124 publications
(50 citation statements)
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“…The net photocurrent owing to these carriers is dominated by the edge closest to the point of illumination. This physical picture is analogous to the microscopy of photo-and electron-beam-induced current in semiconductor devices 24,25 , where the net induced current reflects the transport of minority carriers. In the present case, both hot electrons and hot holes simultaneously act as 'minority' carriers.…”
mentioning
confidence: 93%
“…The net photocurrent owing to these carriers is dominated by the edge closest to the point of illumination. This physical picture is analogous to the microscopy of photo-and electron-beam-induced current in semiconductor devices 24,25 , where the net induced current reflects the transport of minority carriers. In the present case, both hot electrons and hot holes simultaneously act as 'minority' carriers.…”
mentioning
confidence: 93%
“…Fig. 1 shows a typical measurement configuration known as planar-collector geometry [18,19]. As a charge collection technique, EBIC method employs a Schottky barrier or a p-n junction to collect the current resulting from the nonequilibrium minority carriers generated by the beam of the SEM.…”
Section: Electron Beam Induced Current Techniquementioning
confidence: 99%
“…Note that the diffusivity D is missing from the denominator in (14). This is because the Green's function satisfies the homogenous equation (11).…”
Section: B Expression For the U-shaped Junctionmentioning
confidence: 99%
“…Thus, the reciprocity theorem is shown to be valid. Substituting the Green's function into (14) gives…”
Section: B Expression For the U-shaped Junctionmentioning
confidence: 99%
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