2015
DOI: 10.3762/bjnano.6.46
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A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans

Abstract: SummaryWe describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 × 5 × 5 μm3 is mounted on a large-area scanner with a scan range of 800 × 800 × 35 μm3. In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflectio… Show more

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Cited by 5 publications
(6 citation statements)
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References 65 publications
(49 reference statements)
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“…In case of fluorescence microscopy a calibration of feature fluorescence intensity against feature height from (standard) AFM is needed for each ink [28] and even if only feature area is extracted, fluorescent doping of the ink is naturally inevitable [29]. Details on the specially designed ultra-large scale area AFM scan setup as well as validation measurements on test structures using this scanner setup are described elsewhere [31].…”
Section: Afm Analysis With Ultra-large Scan Rangementioning
confidence: 99%
“…In case of fluorescence microscopy a calibration of feature fluorescence intensity against feature height from (standard) AFM is needed for each ink [28] and even if only feature area is extracted, fluorescent doping of the ink is naturally inevitable [29]. Details on the specially designed ultra-large scale area AFM scan setup as well as validation measurements on test structures using this scanner setup are described elsewhere [31].…”
Section: Afm Analysis With Ultra-large Scan Rangementioning
confidence: 99%
“…As shown in Figure 7, this achievement extends the application of such sensors to dynamic devices e.g., dynamic mode AFM [15]. As a TMR-based AFM cantilever is oscillated at its resonance frequency (Figure 7a), upward and downward bending causes stress alternation σ(t) between tensile and compressive stresses.…”
Section: Resultsmentioning
confidence: 69%
“…Figure 7c shows a topography image of a PMMA grating obtained by dynamic imaging using a TMR sensor read-out [6]. Having studied TMR sensors in terms of minimum detectable deflection as height and phase contrasts, atomic-step edges of 2.54 Å on Au (111) terraces and self-assembled monolayers of peruorodecyltrichlorosilane have been successfully imaged by amplitude and frequency modulated AFM [15]. …”
Section: Resultsmentioning
confidence: 99%
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“…Importantly, our software-only alignment scheme was implemented on a commercial AFM (Cypher ES, Asylum Research). Hence, it can be immediately implemented at no cost on Asylum Research AFMs or custom-built AFMs controlled by an Asylum controller. To promote such adoption, we have shared the source code for our algorithm and accompanying documentation via GitHub . Our algorithm is extendable to other commercial AFMs that support adequate flexibility in creating user-defined data-acquisition protocols.…”
Section: Resultsmentioning
confidence: 99%