A scanning positron microscope for defect analysis in materials science

Triftshäuser, W.; Kögel, G.; Sperr, P.; Britton, D.T.; Uhlmann, K.; Willutzki, P.

doi:10.1016/s0168-583x(97)00174-2

Cited by 15 publications

(8 citation statements)

References 14 publications

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“…The latter is partly responsible for the small number of scanning positron microprobes (SPMs), comparable to a scanning electron microscope (SEM), as the focusing of the beam with reasonable intensity even at a large-scale facility results in spot sizes of the order of 5 m (Greif et al, 1997;Triftshäuser et al, 1997). Another limitation for the SPM is the lateral straggling and the positron diffusion length of several hundreds of nanometers in a perfect crystal that will limit the spot size even if the focus is improved.…”

Section: Positron Annihilation Methodsmentioning

confidence: 99%

Defect identification in semiconductors with positron annihilation: Experiment and theory

2013

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Positron annihilation spectroscopy is particularly suitable for studying vacancy-type defects in semiconductors. Combining state-of-the-art experimental and theoretical methods allows for detailed identification of the defects and their chemical surroundings. Also charge states and defect levels in the band gap are accessible. In this review the main experimental and theoretical analysis techniques are described. The usage of these methods is illustrated through examples in technologically important elemental and compound semiconductors. Future challenges include the analysis of noncrystalline materials and of transient defect-related phenomena.

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Section: Positron Annihilation Methodsmentioning

confidence: 99%

Defect identification in semiconductors with positron annihilation: Experiment and theory

2013

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“…For instance, it is possible to investigate the relation between vacancytype defects and crack progress of nuclear materials, and the degradation analysis of semiconductor devices. Several positron microbeams have already been developed [1][2][3][4][5]. Munich group successfully formed a positron microbeam with a diameter of 2 mm using a remoderation technique and an in-lens type objective lens [1,2].…”

Section: Introductionmentioning

confidence: 99%

“…Several positron microbeams have already been developed [1][2][3][4][5]. Munich group successfully formed a positron microbeam with a diameter of 2 mm using a remoderation technique and an in-lens type objective lens [1,2]. Bonn group also succeeded to form a positron microbeam with a diameter of 20 mm using a small source and an out-lens type objective lens of the scanning electron microscope (SEM) [3,4].…”

Section: Introductionmentioning

confidence: 99%

Construction of a positron microbeam in JAEA

Maekawa

Kawasuso

2008

Applied Surface Science

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“…This technique is useful for the study of small domains, such as cracks, whiskers and voids. Several positron microbeams have been already developed [1][2][3][4][5][6][7]. Munich group successfully formed a positron microbeam of diameter of 2 µm using the remoderation technique and an in-lens type objective lens [1][2][3].…”

mentioning

confidence: 99%

“…Several positron microbeams have been already developed [1][2][3][4][5][6][7]. Munich group successfully formed a positron microbeam of diameter of 2 µm using the remoderation technique and an in-lens type objective lens [1][2][3]. Bon group also successes to form a positron microbeam of diameter of 20 µm using small source and an out-lens type objective lens of the scanning electron microscope (SEM) [4,5].…”

mentioning

confidence: 99%

Design of a positron microprobe using magnetic lenses

Maekawa¹,

Yu²,

Kawasuso³

2007

Phys. Status Solidi (c)

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We have designed a positron microbeam using magnetic lenses based on the commercial scanning electron microscope (SEM). Employing a source with a diameter of 1 mm and an immersion lenses, the diameter of primary beam can be reduced to 200 µm. This could be further reduced to less than 10 µm using the SEM optics. By introducing a beam pulsing section, positron lifetime measurement using a pulse beam will be also enabled. The extraction of positron beam from the magnetic field was simulated numerically.1 Introduction Lateral scanning of a positron microbeam can provide the spatial distribution of positron annihilation near the subsurface region. This technique is useful for the study of small domains, such as cracks, whiskers and voids. Several positron microbeams have been already developed [1][2][3][4][5][6][7]. Munich group successfully formed a positron microbeam of diameter of 2 µm using the remoderation technique and an in-lens type objective lens [1][2][3]. Bon group also successes to form a positron microbeam of diameter of 20 µm using small source and an out-lens type objective lens of the scanning electron microscope (SEM) [4,5]. To obtain such positron microbeam, a well-focused and monoenergetic positron beam and an objective lens, which is commonly used in the electron microscopy, are required. We have attempted to form the positron microbeam using a high brightness positron beam for the positron diffraction experiment [8,9]. The beam diameter is ~80 µm and counting rate is ~50 cps, which is not enough for the detail two-dimensional scan of samples. In addition, positron lifetime measurement is hardly carried out because of the DC beam. In this work, we therefore designed a new positron microbeam and carried out the feasibility study.

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A scanning positron microscope for defect analysis in materials science

Cited by 15 publications

References 14 publications

Defect identification in semiconductors with positron annihilation: Experiment and theory

Defect identification in semiconductors with positron annihilation: Experiment and theory

Construction of a positron microbeam in JAEA

Design of a positron microprobe using magnetic lenses

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