A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

Fabrication of NOx gas sensors using In2O3–ZnO composite films

“…Among the materials used, In 2 O 3 is known to be sensitive to some oxidizing gases, such as NO x [5][6][7][8]16] and ozone [9,10]. In order to improve the sensor sensitivity, nanostructured In 2 O 3 [11,12] or binary oxide films [13,14] have been used.…”

Structural and photoluminescence properties of single-crystalline In2O3 films grown by metal organic vapor deposition

“…It has a wide band gap with the value of about 3.7 eV, and can be used for a number of applications in thin film form, such as flat-panel displays [4], gas sensors [5], liquid crystal displays [6], solar cells [7], light-emitting diodes [8] and other optoelectronic devices. Several methods have been employed to deposit these films, like spray pyrolysis [9], magnetron sputtering [10], pulsed laser deposition (PLD) [11], electron beam evaporation [12], sol-gel [13] and metalorganic chemical vapor deposition (MOCVD) [14]. Among these methods, the MOCVD process is suitable for fabrication of thin films due to its easy control of deposition rate and film composition, and relatively large throughput up to commercial volume.…”

Effects of temperature on indium tin oxide particles synthesized by co-precipitation

“…Over the past decades, many researches have been made on the preparation of ITO thin films because ITO films have been widely applied in fabricating photovoltaic cells [2], sensor modules [3] and transparent electrode materials for both electrochromic cells [4] and liquid crystal display devices [1]. The current studies for ITO are mainly concentrated in preparation and in properties of its powders [4,5]. For various applications, a significant interest has been focused on the field of preparing low-dimensional and quasi-one-dimensional structured semiconducting ITO particle such as nano-sphere [6], nanoaciculae [7], nano-rod [4], nano-wire [8] and nano-tube [9].…”