A robust optimal scheduling method driven by multi-objects is proposed for the collaborative optimization problem between dynamic scheduling, preventive maintenance of equipment, and robustness of scheduling schemes in a complex manufacturing system. Firstly, the equipment maintenance task is mapped to the process level, and composite dispatching rules with weight parameters are designed, which flexibly consider equipment maintenance and system processing status. Secondly, the performance-driven ideology is analyzed through two models based on the IWOA-MLP algorithm. Thirdly, the feedback mechanism ideology facilitates adaptive closed-loop optimizations. Finally, a series of experiments were carried out on the simulation platform of a semiconductor manufacturing enterprise in Shanghai. The experimental results show that the proposed robust optimal scheduling system can effectively deal with mixed uncertainty, improve production performances, and maintain highly robust measures.