2015
DOI: 10.1016/j.ces.2015.02.002
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A robust nonlinear model predictive controller for a multiscale thin film deposition process

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Cited by 40 publications
(20 citation statements)
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“…Needless to say, the computational cost for PSE depends on the number of uncertain parameters and the number of terms considered in the PSE, which both require the calculation of additional sensitivities to construct representative low-order models. 67,68 Adding more terms to the PSE can improve the accuracy of the PSEbased approximation 35,36,38 and the number of terms required for reasonable accuracy depends on the degree of nonlinearity of the system model. Higher-order series expansions improve the model predictions but result in higher computational costs due to the computation of additional higher-order sensitivity terms.…”
Section: Uncertainty Analysis Using Psementioning
confidence: 99%
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“…Needless to say, the computational cost for PSE depends on the number of uncertain parameters and the number of terms considered in the PSE, which both require the calculation of additional sensitivities to construct representative low-order models. 67,68 Adding more terms to the PSE can improve the accuracy of the PSEbased approximation 35,36,38 and the number of terms required for reasonable accuracy depends on the degree of nonlinearity of the system model. Higher-order series expansions improve the model predictions but result in higher computational costs due to the computation of additional higher-order sensitivity terms.…”
Section: Uncertainty Analysis Using Psementioning
confidence: 99%
“…Rasoulian and Ricardez-Sandoval have proposed an uncertainty analysis framework using PSE, which has been applied for robust optimization and online control of a thin film deposition process using standard proportional integral controllers and advanced model-based control schemes. 35,36,[49][50][51] Nagy and Allg€ ower employed a meanvariance approach to integrate the effects of parametric uncertainty into a robust end-point nonlinear model predictive control scheme for a thin film deposition process. 52 These studies, however, analyze the uncertainty propagation in spatially homogeneous multiscale systems.…”
Section: Introductionmentioning
confidence: 99%
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“…Rasoulian and Ricardez‐Sandoval tackle the same process, developing a robust NMPC algorithm to minimize the surface roughness of the film. They developed a closed‐form model that can predict the control objectives in the presence of uncertainties . Later, they extended their work and applied the model in a stochastic NMPC to provide a robust control strategy for the deposition process under uncertainties in the multiscale model parameters .…”
Section: Introductionmentioning
confidence: 99%
“…Both expansions have been incorporated into a number of optimal design and robust optimization studies for a variety of different system models . In particular, these approaches have been previously implemented to propagate uncertainty through multiscale systems such as thin film deposition and catalytic flow reactors . However, the implementation of PSE and PCE is limited in models that lack a closed‐form representation, such as the aforementioned multiscale processes.…”
Section: Introductionmentioning
confidence: 99%