2017
DOI: 10.1016/j.precisioneng.2017.01.014
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A review on recent research trends in servo pneumatic positioning systems

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Cited by 87 publications
(46 citation statements)
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“…This mechanism uses pneumatic actuator equipped with suction cup to extend and retract the piston to and from the workpiece. D. Saravanakumar et al [7] come out with a dynamics motion of pneumatic cylinder. There are four forces that create the net force of the pneumatic actuator, which has been discuss by D. Saravanakumar The various of forces acting on the cylinder is shown in the Fig.…”
Section: Lifting Mechanismmentioning
confidence: 99%
“…This mechanism uses pneumatic actuator equipped with suction cup to extend and retract the piston to and from the workpiece. D. Saravanakumar et al [7] come out with a dynamics motion of pneumatic cylinder. There are four forces that create the net force of the pneumatic actuator, which has been discuss by D. Saravanakumar The various of forces acting on the cylinder is shown in the Fig.…”
Section: Lifting Mechanismmentioning
confidence: 99%
“…In recent years, with the development of microelectronic technology and the emergence of high-performance pneumatic components, pneumatic servo systems have been developed rapidly [5]. However, in some special cases, such as pneumatic manipulators for welding and feeding operations, gas floating vibration isolation optical platforms and medical assisted robots, precision control of pneumatic actuator is of particular importance [6].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, a positioning error is not allowed in the drawing process of this mask, and high exposure precision is required for the positioning stage. In general, an electromagnetic actuator is adopted as an actuator of a precision positioning stage because of excellent linearity (Saravanakumar et al, 2017). However, in the case of this actuator, it is inevitable to generate heat and magnetism, which causes deterioration of the exposure precision of the EB.…”
Section: Introductionmentioning
confidence: 99%