A Review of the Capacitive MEMS for Seismology

D’Alessandro, Antonino; Scudero, Salvatore; Vitale, Giovanni

doi:10.3390/s19143093

Cited by 103 publications

(50 citation statements)

References 124 publications

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“…However, only very recent developments of portable seismic rotation and strain sensors made the direct observations of seismic wavefield gradients possible for a broad range of applications, such as volcanology [ 5 , 6 , 7 ], ocean bottom seismology [ 8 , 9 , 10 ], structural health monitoring [ 11 , 12 , 13 ], seismic exploration [ 14 , 15 , 16 , 17 ], microzonation in urban environments [ 18 ], and glaciology [ 19 ]. The most commonly used technologies for seismic ground rotation sensing are fiber-optic Sagnac interferometry [ 20 ], micro-electro mechanical systems [ 21 ], small-scale finite differencing within a rigid configuration of translation sensors [ 22 ], and liquid-based electrochemical transducers [ 23 ]. The technology of distributed acoustic sensing (DAS) makes the observation of seismically induced axial strain in temporary field experiments possible [ 24 , 25 , 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

Rotation, Strain, and Translation Sensors Performance Tests with Active Seismic Sources

Bernauer

Behnen

Wassermann

et al. 2021

Sensors

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Interest in measuring displacement gradients, such as rotation and strain, is growing in many areas of geophysical research. This results in an urgent demand for reliable and field-deployable instruments measuring these quantities. In order to further establish a high-quality standard for rotation and strain measurements in seismology, we organized a comparative sensor test experiment that took place in November 2019 at the Geophysical Observatory of the Ludwig-Maximilians University Munich in Fürstenfeldbruck, Germany. More than 24 different sensors, including three-component and single-component broadband rotational seismometers, six-component strong-motion sensors and Rotaphone systems, as well as the large ring laser gyroscopes ROMY and a Distributed Acoustic Sensing system, were involved in addition to 14 classical broadband seismometers and a 160 channel, 4.5 Hz geophone chain. The experiment consisted of two parts: during the first part, the sensors were co-located in a huddle test recording self-noise and signals from small, nearby explosions. In a second part, the sensors were distributed into the field in various array configurations recording seismic signals that were generated by small amounts of explosive and a Vibroseis truck. This paper presents details on the experimental setup and a first sensor performance comparison focusing on sensor self-noise, signal-to-noise ratios, and waveform similarities for the rotation rate sensors. Most of the sensors show a high level of coherency and waveform similarity within a narrow frequency range between 10 Hz and 20 Hz for recordings from a nearby explosion signal. Sensor as well as experiment design are critically accessed revealing the great need for reliable reference sensors.

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Section: Introductionmentioning

confidence: 99%

Rotation, Strain, and Translation Sensors Performance Tests with Active Seismic Sources

Bernauer

Behnen

Wassermann

et al. 2021

Sensors

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“…Micro-Electro-Mechanical-System (MEMS) inertial sensors improve obviously in this decade [1]- [4]. High-g accelerometers were employed in smart fuzes to obtain the dynamic signals of penetration during the layer-counting application.…”

Section: Introductionmentioning

confidence: 99%

Design and Experiment of a Novel High-Impact MEMS Ceramic Sandwich Accelerometer for Multi-Layer Target Penetration

Cui

Huang²,

et al. 2020

IEEE Access

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The output signal of traditional cantilever accelerometers usually overlapping and tailing during the high-velocity penetration process. And the sensitivity of traditional cantilever accelerometers cannot satisfy the application of multi-layer target penetration, that process contains large length-to-diameter ratios and high velocities. This paper proposes a novel high-impact Micro-Electro-Mechanical-System (MEMS) ceramic sandwich accelerometer (HMCSA) for the measurement of penetration-overload signals. Firstly, the HMCSA structure was designed and its structure-sensitive model was established. Then, the filling material in HMCSA was selected and the structure was simulated in ANSYS/LS-DYNA software. After that, the structure MEMS processing was introduced and the monitoring system was designed. Finally, the multi-layer target penetration process was simulated and HMCSA was tested in lab environment. The experiment verified that the design and manufacture of HMCSA was correct, and HMCSA can detect 30 000g acceleration.

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“…Miniaturization is a key enabling technological factor in space exploration, since it allows cost-reduction [ 2 ]. Examples can be found in the use of miniaturized COTS solid-state sensors [ 3 , 4 , 5 ], or MEMS-NEMS, [ 6 ], or even micro-propulsion systems [ 7 , 8 , 9 ]. Besides the obvious cost reduction, payload miniaturization allows the use of smaller spacecraft, such as penetrators [ 10 , 11 ], or the possibility of placing the sensors in small rovers [ 12 ], and landers [ 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

Analyzing the Performance of a Miniature 3D Wind Sensor for Mars

Domínguez-Pumar

Kowalski

Jiménez

et al. 2020

Sensors

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This paper analyzes the behavior of a miniature 3D wind sensor designed for Mars atmosphere. The sensor is a spherical structure of 10 mm diameter divided in four sectors. By setting all the sectors to constant temperature, above that of the air, the 3D wind velocity vector can be measured. Two sets of experiments have been performed. First, an experimental campaign made under typical Mars conditions at the Aarhus Wind Tunnel Simulator is presented. The results demonstrate that both wind speed and angle can be efficiently measured, using a simple inverse algorithm. The effect of sudden wind changes is also analyzed and fast response times in the range of 0.7 s are obtained. The second set of experiments is focused on analyzing the performance of the sensor under extreme Martian wind conditions, reaching and going beyond the Dust Devil scale. To this purpose, both high-fidelity numerical simulations of fluid dynamics and heat transfer and experiments with the sensor have been performed. The results of the experiments, made for winds in the Reynolds number 1000–2000 range, which represent 65–130 m/s of wind speed under typical Mars conditions, further confirm the simulation predictions and show that it will be possible to successfully measure wind speed and direction even under these extreme regimes.

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A Review of the Capacitive MEMS for Seismology

Cited by 103 publications

References 124 publications

Rotation, Strain, and Translation Sensors Performance Tests with Active Seismic Sources

Rotation, Strain, and Translation Sensors Performance Tests with Active Seismic Sources

Design and Experiment of a Novel High-Impact MEMS Ceramic Sandwich Accelerometer for Multi-Layer Target Penetration

Analyzing the Performance of a Miniature 3D Wind Sensor for Mars

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