A Review of Stick–Slip Nanopositioning Actuators

Pan, Peng; Yang, Feifei; Wang, Zhenhua; Zhong, Bowen; Sun, Lining; Ru, Changhai

doi:10.1007/978-3-319-23853-1_1

Cited by 11 publications

(6 citation statements)

References 55 publications

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“…The excitation electrical signal for PSSAs: (a) the sawtooth waveform (Bansevicius and Blechertas, 2008; Chang and Li, 1999; Chu and Fan, 2006; Fan et al, 2019; Gao et al, 2019a, 2019b; Higuchi et al, 1990; Huang and Sun, 2019; Huang et al, 2011, 2012, 2016, 2020; Hunstig, 2017; Kurosawa and Ueha, 1991; Lee et al, 2007; Li et al, 2015a, 2017a, 2018b, 2019c, 2020c; Liu et al, 2012, 2019a; Lyding et al, 1988; Mashimo, 2014; Oubellil et al, 2019; Pan et al, 2016, 2019; Pohl, 1987a; Qin et al, 2019b; Salim et al, 2018; Shao et al, 2019a, 2019b; Smith et al, 1996; Song et al, 2018; Tang et al, 2020; Tomikawa et al, 1989; Wang and Lu, 2012; Wang et al, 2011, 2017c, 2019d, 2019e, 2019f; Wen et al, 2013; Xu et al, 2020; Yang et al, 2019, 2020b; Yu et al, 2020; Zesch et al, 1995; Zhang et al, 2019a), (b) the improvement of waveform shaping of stick phase (Hunstig et al, 2013a, 2013b; Wang and Lu, 2012; Zhang et al, 2018), (c) the improvement of waveform shaping of slip phase (Cheng et al, 2016, 2017b; Guo et al, 2019; Wang et al, 2016a), (d) the cycloid waveform (Bordoni et al, 1994; Chang and Li, 1999…”

Section: Working Principle and Excitation Signal Of Fhms-pssasmentioning

confidence: 99%

“…Figure 2. The excitation electrical signal for PSSAs: (a) the sawtooth waveform(Bansevicius and Blechertas, 2008;Chang and Li, 1999;Chu and Fan, 2006;Fan et al, 2019;Gao et al, 2019aGao et al, , 2019bHiguchi et al, 1990;Huang and Sun, 2019;Huang et al, 2011Huang et al, , 2012Huang et al, , 2016Huang et al, , 2020Hunstig, 2017;Kurosawa and Ueha, 1991;Lee et al, 2007;Li et al, 2015aLi et al, , 2017aLi et al, , 2018bLi et al, , 2019cLi et al, , 2020cLiu et al, 2012Liu et al, , 2019aLyding et al, 1988;Mashimo, 2014;Oubellil et al, 2019;Pan et al, 2016Pan et al, , 2019Pohl, 1987a;Qin et al, 2019b;Salim et al, 2018;Shao et al, 2019aShao et al, , 2019bSmith et al, 1996;Song et al, 2018;Tang et al, 2020;Tomikawa et al, 1989;Wang and Lu, 2012;Wang et al, 2011Wang et al, , 2017cWang et al, , 2019dWen et al, 2013;Xu et al, 2020;…”

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confidence: 99%

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Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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Piezoelectric stick-slip actuators (PSSAs) are famous for ultimate working condition adaptability, simple structure, and positioning accuracy. To meet the demand of industrial application, lots of PSSAs designed with flexure hinge mechanisms (FHMs-PSSAs) have been developed to realize the requirements of translational motion, rotational motion, multi-degree-of-freedom (multi-DOF) motion. The output performance of the FHMs-PSSAs has been greatly improved, including load capacity, speed, and accuracy; moreover, some approaches to solve the problem of the backward motion are provided as well. In this work, the working principle of FHMs-PSSAs is introduced, and the excitation signals applicable to FHMs-PSSAs are summarized. Based on the current research and development status, the progress of structure design of FHMs-PSSAs is introduced in accordance with translatory FHMs-PSSAs, rotary FHMs-PSSAs, and multi-DOF FHMs-PSSAs. Additionally, the developed analysis methods and design schemes to improve the performance are introduced, including theoretical analysis methods, consistency scheme of forward and reverse performance, suppression scheme of the backward motion, and improvement scheme of positioning accuracy. The significance of this work can be regarded as a further supplement to the previous review articles on the PSSAs, which will provide a reference and guidance for the future development of FHMs-PSSAs.

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Section: Working Principle and Excitation Signal Of Fhms-pssasmentioning

confidence: 99%

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confidence: 99%

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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“…However, due to their special material characteristics, the movement range of direct drive type PEAs is limited. So, as a kind of friction inertial drive PEAs, stick‐slip type piezoelectric actuators (SSPEAs) are further developed 8‐10 to overcome this limitation and obtain high positioning precision. The following paragraph gives a brief introduction of the stick‐slip principle of SSPEAs, and more details can be found in the survey papers 11‐13 …”

Section: Introductionmentioning

confidence: 99%

A fuzzy model predictive controller for stick‐slip type piezoelectric actuators

Cheng

Wang

Qin

2021

Optim Control Appl Methods

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In nano/micro‐positioning applications, stick‐slip type piezoelectric actuators (SSPEAs) are usually employed for a satisfactory performance in both the movement range and the positioning accuracy. Unfortunately, the controller design of SSPEAs is a challenging task, which is seldom studied in the literature. So this article presents an idea of using the fuzzy model predictive control approach for the high‐precision positioning. First, a prototype of the stick‐slip type piezoelectric actuator is designed. Then a Takagi‐Sugeno fuzzy model is established for the entire SSPEA, whose parameters can be further adapted by the recursive estimation approach based on the online measurement. Based on this model, a predictive controller can be designed for SSPEAs. Compared to some existing studies, the proposed fuzzy model directly describes the input–output relationship of the entire SSPEA rather than modeling separately. As a result, the controller can be simplified. Finally, some experiments are conducted on the SSPEA prototype, which demonstrates a satisfactory control performance

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“…The driving principles of piezoelectric motors can be classified into direct-drive, displacement-amplified-drive, ultrasonic-drive, inchworm-drive, inertia-drive, etc. Inertia-drive motors, also known as “stick-slip” motors, have the prominent merits of compact size and simple driving signal, attract many research attentions [1,2,3].…”

Section: Introductionmentioning

confidence: 99%

Design and Waveform Assessment of a Flexible-Structure-Based Inertia-Drive Motor

et al. 2019

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This paper reports the mechanical design, waveform investigation and experimental validation of an flexible-structure-based inertia-drive linear motor. The flexible structure is designed and verified with finite element analysis to meet the bandwidth requirement for high-frequency actuation. In order to improve the output velocity, non-resonance low-harmonic driving waveform is implemented and evaluated. Experimental results show that the motor is capable of an output velocity of 2.41 mm/s with the waveform, compared to 0.73 mm/s with the classic saw-tooth waveform actuation. The improvement of the non-resonance low-harmonic waveform for the flexible-structure-based motor is confirmed.

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A Review of Stick–Slip Nanopositioning Actuators

Cited by 11 publications

References 55 publications

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

A fuzzy model predictive controller for stick‐slip type piezoelectric actuators

Design and Waveform Assessment of a Flexible-Structure-Based Inertia-Drive Motor

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