2024
DOI: 10.1016/j.mne.2023.100235
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A review of microfabrication approaches for the development of thin, flattened heat pipes and vapor chambers for passive electronic cooling applications

Ioannis Filippou,
Vasiliki Tselepi,
Kosmas Ellinas
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Cited by 3 publications
(1 citation statement)
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“…During etching, a very small number of etching inhibitors (usually less than 1%) from the electrode are sputtered on the surface, acting as micro- and nanomasks resulting in nanograss–nanofilament formation, which grows to larger hierarchical micro/nanostructures as etching time increases. More details about the process can be found in some previous work, , but the process is highly reproducible, and it has been implemented for the fabrication of micro/nanotextured surfaces focused on a plethora of applications (i.e., atmospheric water collection, antifogging surfaces, repellency of low-surface tension liquids, direct covalent immobilization of protein molecules on organic polymers, functional microdevices, , etc.). In order for the PMMA surfaces to become superhydrophobic, after the plasma micro/nanotexturing step for 1 or 6 min, a thin hydrophobic coating (about 30 nm) was deposited using plasma deposition of C 4 F 8 gas for 1 min (plasma deposition conditions: 900 W power, 25 sccm gas flow rate, and 40 mTorr pressure).…”
Section: Methodsmentioning
confidence: 99%
“…During etching, a very small number of etching inhibitors (usually less than 1%) from the electrode are sputtered on the surface, acting as micro- and nanomasks resulting in nanograss–nanofilament formation, which grows to larger hierarchical micro/nanostructures as etching time increases. More details about the process can be found in some previous work, , but the process is highly reproducible, and it has been implemented for the fabrication of micro/nanotextured surfaces focused on a plethora of applications (i.e., atmospheric water collection, antifogging surfaces, repellency of low-surface tension liquids, direct covalent immobilization of protein molecules on organic polymers, functional microdevices, , etc.). In order for the PMMA surfaces to become superhydrophobic, after the plasma micro/nanotexturing step for 1 or 6 min, a thin hydrophobic coating (about 30 nm) was deposited using plasma deposition of C 4 F 8 gas for 1 min (plasma deposition conditions: 900 W power, 25 sccm gas flow rate, and 40 mTorr pressure).…”
Section: Methodsmentioning
confidence: 99%