A review of focused ion beam milling techniques for TEM specimen preparation

Giannuzzi, Lucille A.; Stevie, F. A.

doi:10.1016/s0968-4328(99)00005-0

Cited by 1,059 publications

(595 citation statements)

References 21 publications

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“…Cleaved {011} cross-sections were examined using a HITACHI S-4800 field emission SEM operating at 5 kV. Electron transparent sections for cross-sectional TEM were prepared using a standard focused ion beam (FIB) milling procedures (20) in a FEI 200 FIB workstation. The TEM characterization was performed using a JEOL JEM 2010 TEM operating at 200 kV.…”

Section: Methodsmentioning

confidence: 99%

Mechanism that Dictates Pore Width and <111>A Pore Propagation in InP

et al. 2013

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We report a mechanism for pore growth and propagation based on a three-step charge transfer model. The study is supported by electron microscopy analysis of highly doped n-InP samples anodised in aqueous KOH. The model and experimental data are used to explain propagation of pores of characteristic diameter preferentially along the <111>A directions. We also show evidence for deviation of pore growth from the <111>A directions and explain why such deviations should occur. The model is self-consistent and predicts how carrier concentration affects the internal dimensions of the porous structures.

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Section: Methodsmentioning

confidence: 99%

Mechanism that Dictates Pore Width and <111>A Pore Propagation in InP

et al. 2013

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“…ers [70 enabling accurate determination of the concave's shape and depth. determine a correlation between crystal grain orientation on one hand and shape, size and depth of the FIB-milled concaves on the other hand.…”

Section: As-receivedmentioning

confidence: 99%

FIB Patterning of Stainless Steel for the Development of Nano-structured Stent Surfaces for Cardiovascular Applications

Schmidt

Nazneen

Galvin

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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“…The thinning and extraction of TEM specimens with accuracy and site-specificity is an advantage of FIB (Kirk et al, 1989;Young et al, 1990;Basile et al, 1991;Giannuzzi & Stevie, 1999;Anderson & Klepeis, 2005;Kamino et al, 2005;Jia et al, 2014). A significant fraction of the specimens produced at any given laboratory is now prepared using FIB technology.…”

Section: Introductionmentioning

confidence: 99%

A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation

et al. 2017

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This paper reports on the substantial improvement of specimen quality by use of a low voltage (0.05 to~1 keV), small diameter (~1 μm), argon ion beam following initial preparation using conventional broad-beam ion milling or focused ion beam. The specimens show significant reductions in the amorphous layer thickness and implanted artifacts. The targeted ion milling controls the specimen thickness according to the needs of advanced aberration-corrected and/or analytical transmission electron microscopy applications.

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A review of focused ion beam milling techniques for TEM specimen preparation

Cited by 1,059 publications

References 21 publications

Mechanism that Dictates Pore Width and <111>A Pore Propagation in InP

Mechanism that Dictates Pore Width and <111>A Pore Propagation in InP

FIB Patterning of Stainless Steel for the Development of Nano-structured Stent Surfaces for Cardiovascular Applications

A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation

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