A review of active optical devices: II. Phase modulation

“…High transparency characteristic of glass was employed for many optical systems based on micro-optical-electro-mechanical-systems, as previously reported [17][18][19]. Optical devices allow manipulation of light including amplitude [20] and phase [21]. In this section, we show an optical modulator device capable of the integration of an image sensor for functional image sensing applications.…”

Section: Optical Modulatormentioning

confidence: 84%

Glass Patterning: Technologies and Applications

Toàn¹,

Inomata²,

Toda³

et al. 2018

Advances in Glass Science and Technology

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In this work, we review the progress in recent studies on glass patterning including technologies and applications. Four technologies for glass micromachining including wet etching, sandblasting, reactive ion etching, and glass reflow process are analyzed. Advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Various microsystem applications using the above glass patterning technologies like thermal sensors, hermetically packaged capacitive silicon resonators, optical modulator devices, glass microfluidics, micro-heaters, and vacuum-sealed capacitive micromachined ultrasonic transducer arrays are reported.

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“…The phase modulators in the THz region were essential components for THz beam steering, beam shaping, holographic imaging, and controlling the polarization 45 – 48 . Nevertheless, the current phase handling techniques used in optical and microwave regions 49 , 50 do not work effectively when employed at THz frequencies. Very recently, a GeTe-based coding metamaterial was demonstrated, showing its promising potential for controlling the phase of THz waves 51 .…”

Section: Resultsmentioning

confidence: 99%

Nonvolatile chirality switching in terahertz chalcogenide metasurfaces

et al. 2022

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Actively controlling the polarization states of terahertz (THz) waves is essential for polarization-sensitive spectroscopy, which has various applications in anisotropy imaging, noncontact Hall measurement, and vibrational circular dichroism. In the THz regime, the lack of a polarization modulator hinders the development of this spectroscopy. We theoretically and experimentally demonstrate that conjugated bilayer chiral metamaterials (CMMs) integrated with Ge2Sb2Te5 (GST225) active components can achieve nonvolatile and continuously tunable optical activity in the THz region. A THz time-domain spectroscopic system was used to characterize the device, showing a tunable ellipticity (from ‒36° to 0°) and rotation of the plane polarization (from 32° to 0°) at approximately 0.73 THz by varying the GST225 state from amorphous (AM) to crystalline (CR). Moreover, a continuously tunable chiroptical response was experimentally observed by partially crystallizing the GST225, which can create intermediate states, having regions of both AM and CR states. Note that the GST225 has an advantage of nonvolatility over the other active elements and does not require any energy to retain its structural state. Our work allows the development of THz metadevices capable of actively manipulating the polarization of THz waves and may find applications for dynamically tunable THz circular polarizers and polarization modulators for THz emissions.

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A review of active optical devices: II. Phase modulation

Cited by 11 publications

References 74 publications

Large refractive index changes in ZIF-8 thin films of optical quality

Large refractive index changes in ZIF-8 thin films of optical quality

Glass Patterning: Technologies and Applications

Nonvolatile chirality switching in terahertz chalcogenide metasurfaces

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