A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

Shi, Xun; Lu, Yulan; Xie, Bin; Li, Yadong; Wang, Junbo; Chen, Deyong; Chen, Jian

doi:10.3390/s18082494

Cited by 20 publications

(16 citation statements)

References 23 publications

(25 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As to excitation and detection of resonators, resonant pressure sensors can work based on electrothermal excitation/piezoresistive detection [5,6], electrostatic excitation/capacitive detection [7,8], electromagnetic excitation/electromagnetic detection [9,10], and electrostatic excitation/piezoresistive detection [11,12]. Compared with other types of resonant pressure sensors, the sensors based on electrostatic excitation/piezoresistive detection are featured with high SNRs and simple structures, and thus this type of resonant pressure sensor is under the intensive studies [13].…”

Section: Introductionmentioning

confidence: 99%

“…However, two silicon-silicon bondings and one anodic bonding were required in the fabrication, which was extremely complicated and suffered from limited yield. In order to simplify the device fabrication process, in our group, silicon on insulator (SOI)-based fabrications and wafer-level vacuum packaging were adopted to form resonant pressure micro sensors based on electrostatic excitation/piezoresistive detection [13,17]. However, the key parameters of the sensor structures were not optimal, which led to lower SNRs and compromised performances.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

Zhang

Yan

et al. 2019

Micromachines

View full text Add to dashboard Cite

This paper presents resonant pressure micro sensors based on dual double ended tuning fork (DETF) resonators, which are electrostatically excited and piezoresistively detected. In operation, the barometric pressure under measurement bends the pressure sensitive diaphragm functioning as the anchor of DETF resonators and therefore produces eigenfrequency shifts of the resonators. Theoretical analyses and finite element analyses (FEA) were conducted to optimize the key geometries of the DETF resonators with enhanced signal to noise ratios (SNRs). In fabrications, key steps including deep reactive ion etching (DRIE) and anodic bonding were used, where sleeve holes were adopted to form electrical connections, leading to high-efficiency structure layout. Experimental results indicate that the presented micro sensors produced SNRs of 63.70 ± 3.46 dB in the open-loop characterizations and differential sensitivities of 101.3 ± 1.2 Hz/kPa, in the closed-loop characterizations. In addition, pressure cycling tests with a pressure range of 5 to 155 kPa were conducted, revealing that the developed micro sensors demonstrated pressure shifts of 83 ± 2 ppm, pressure hysteresis of 67 ± 3 ppm, and repeatability errors of 39 ± 2 ppm. Thus, the developed resonant pressure micro sensors may potentially function as an enabling tool for barometric pressure measurements.

show abstract

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

Zhang

Yan

et al. 2019

Micromachines

View full text Add to dashboard Cite

show abstract

“…Figure 7b indicates the changes of the resonant frequencies in response to temperature variation from −35 °C to 85 °C under the application of 100 kPa atmospheric pressure, where the temperature sensitivities were quantified as 3.62 Hz/°C and 3.51 Hz/°C, for the central and side resonators, respectively, which were significantly less than the values (e.g., temperature sensitivities of 12.62 Hz/°C and 12.32 Hz/°C) reported in precious studies [13]. The temperature sensitivity with differentiation was characterized as 0.15 Hz/°C, revealing that the differential setup developed in this paper can effectively address the side effects of temperature variation to some extent.…”

Section: Resultsmentioning

confidence: 77%

“…Leveraging these advantages of electrostatic excitation and piezoresistive detection, previously, we developed a double-ended tuning fork based resonant pressure sensor [13] featured with an accuracy better than 0.01% F.S. (140kpa) However, parallel-plate capacitor drive electrodes were used in the previously reported resonant pressure sensor, which suffered from limitations of negative stiffness, leading to a drive-bias-induced frequency shift and further degradation of the closed-loop frequency stabilities.…”

Section: Introductionmentioning

confidence: 99%

A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators

et al. 2019

Self Cite

View full text Add to dashboard Cite

This study proposes a microfabricated resonant pressure sensor in which a pair of double-ended tuning forks were utilized as resonators where comb electrodes and single-crystal silicon-based piezoresistors were used for electrostatic excitation and piezoresistive detection, respectively. In operations, pressures under measurements deform the pressure-sensitive diaphragm to cause stress variations of two resonators distributed on the central and side positions of the pressure-sensitive diaphragm, where the corresponding changes of the intrinsic resonant frequencies are then captured piezoresistively. The developed resonant pressure sensors were fabricated based on MEMS with open-loop and closed-loop characterizations conducted. Key sensing parameters including quality factors, differential pressure/temperature sensitivities and fitting errors were quantified as higher than 17,000, 48.24 Hz/kPa, 0.15 Hz/°C and better than 0.01% F.S. (140 kpa), respectively. In comparison to previously reported resonant pressure sensors driven by parallel-plate electrodes, the developed sensor in this study is featured with a lower temperature sensitivity and a higher stability.

show abstract

“…However, those developed sensors included only one resonator which might cause the output frequency strongly sensitive to temperature. Our previous works developed several types of resonant pressure sensors based on dual resonators, such as Luo (2014) [22], Xie (2015) [23], and Shi (2018) [24], whereas the lowest working temperature was constrained, which mainly result from the mismatched sensitivities of two resonators. In addition, the pressure measurement ranges of the developed sensor mentioned above were less than 300 kPa, and much larger pressure measure ranges had not been reported.…”

Section: Introductionmentioning

confidence: 99%

A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators

Yan

Xiang

et al. 2019

Sensors

Self Cite

View full text Add to dashboard Cite

This paper presents a resonant pressure microsensor with the measurement range of 1 MPa suitable for the soaring demands of industrial gas pressure calibration equipment. The proposed microsensor consists of an SOI layer as a sensing element and a glass cap for vacuum packaging. The sensing elements include a pressure-sensitive diaphragm and two resonators embedded in the diaphragm by anchor structures. The resonators are excited by a convenient Lorentz force and detected by electromagnetic induction, which can maintain high signal outputs. In operation, the pressure under measurement bends the pressure-sensitive diaphragm of the microsensor, producing frequency shifts of the two underlining resonators. The microsensor structures were designed and optimized using finite element analyses and a 4” SOI wafer was employed in fabrications, which requires only one photolithographic step. Experimental results indicate that the Q-factors of the resonators are higher than 25,000 with a differential temperature sensitivity of 0.22 Hz/°C, pressure sensitivities of 6.6 Hz/kPa, and −6.5 Hz/kPa, which match the simulation results of differential temperature sensitivity of 0.2 Hz/°C and pressure sensitivities of ±6.5 Hz/kPa. In addition, characterizations based on a closed-loop manner indicate that the presented sensor demonstrates low fitting errors within 0.01% FS, high accuracy of 0.01% FS in the pressure range of 20 kPa to 1 MPa and temperature range of −55 to 85 °C, and the long-term stability within 0.01% FS in a 156-day period under the room temperature.

show abstract

A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection

Cited by 20 publications

References 23 publications

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators

A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators

A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators

Contact Info

Product

Resources

About