A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

Wang, Jiantao; Liu, Yong; Shen, Yanhu; Chen, Song; Yang, Zhigang

doi:10.3390/mi7120219

Cited by 27 publications

(12 citation statements)

References 8 publications

(8 reference statements)

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“…The diaphragm separates the fluid from the piezoelectric actuator. Silicon (Cazorla et al, 2016;Dereshgi, 2016), Beryllium bronze (Wang et al, 2016), Polyethylene Terephthalate (PET) (Pabst et al, 2013;Pabst et al, 2014), SU8 (Le et al, 2017), Brass (Dong et al, 2017), Parylene-C (PCPX)-Tetraethyl Orthosilicate (TEOS) (Johnson et al, 2016), Nafion-Pt (Shoji et al, 2016), Earthworm muscle (Tanaka et al, 2017), Polyimide (Hamid et al, 2016), Elastomeric (Robertson et al, 2016), Thermoplastic Polyurethane (TPU) (Shaegh et al, 2015), PDMS (Zhou et al, 2011;Kawun et al, 2016) and Soft Magnetorheological Elastomer (SMRE) (Ehsani et al, 2017) are diaphragm materials that are mainly used in the literature. Maillefer et al (2001) used a silicon diaphragm in a micropump designed for drug delivery, because of its low cost and high performance (Maillefer et al, 2001).…”

Section: Introductionmentioning

confidence: 99%

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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A commercial micropump should provide properties that justify the simple structure and miniaturization, high reliability, simple working principle, low cost and no need for complex controller. In this study, two novel piezoelectric actuated (lead zirconate titanate-PZT) valveless micropumps that can achieve high flow rates by pumping chambers and fixed reservoirs were designed and fabricated. Extensive experiments were conducted to investigate the effects of hydrodynamic and electromechanical on flow rates of the Single Diaphragm Micropump (SDM) and the Bi-diaphragm Micropump (BDM). BDM had two actuators facing to the same chamber at 180-degree phase shift. The primary features of the proposed designs were the high flow rates at low driving voltages and frequencies with the help of innovative design geometry. 3D-printing technique providing one-step fabrication for integrated micropumps with fixed reservoir was used. The micropump materials were biocompatible and can be used repeatedly to reduce costs. Mechanical parameters such as tensile test for silicon diaphragm, surface topography scanning by microscopy techniques and drop shape analysis for hydrophobic property were investigated to reveal surface wetting and flow stability. In addition, the effect of reservoir height was investigated and the calibration flow rates were measured during the inactive periods. The maximum diaphragm displacements were obtained at 45 V and 5 Hz. The maximum flow rate of SDM and BDM at 45 V and 20 Hz were 32.85 ml/min and 35.4 ml/min respectively. At all driving voltage and frequency levels, BDM had higher flow rates than of SDM.

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Section: Introductionmentioning

confidence: 99%

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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“…The U-shaped structure improved the stress distribution and output displacement of the actuator. In 2016, Wang et al [ 14 ] proposed a rectangular piezoelectric vibrator that can effectively release the vibrating constraints of the vibrator, and enlarge its center output displacement. In 2019, Wang et al [ 15 ] proposed a square piezoelectric vibrator with a flexible support that was used as the driving unit of the pump.…”

Section: Introductionmentioning

confidence: 99%

Research on Inlet and Outlet Structure Optimization to Improve the Performance of Piezoelectric Pump

Zhao

Wang

et al. 2020

Micromachines

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As piezoelectric pumps are used in more fields, they are gradually failing to meet the application requirements due to their low output performance. Therefore, improving the output performance of piezoelectric pumps helps to expand their applications. This paper argued that the dynamic load of liquid in the inlet and outlet pipelines was an important factor that weakened the performance of piezoelectric pumps. Therefore, in order to reduce the dynamic load, it was proposed to replace the conventional piezoelectric pump inlet and outlet by an elastic inlet and outlet. After introducing the structure and working principle of elastic inlet and outlet, the mechanism of reducing the dynamic load by elastic inlet and outlet was analyzed. Then, the influence of the elastic cavity height on the performance of the piezoelectric pump was studied from both fluid simulation and theoretical analysis. Finally, several prototypes were made. The effectiveness of the elastic inlet and outlet on improving the performance of the prototype and the effect of the elastic cavity height on the performance of the prototype were tested, respectively. The test results showed that the elastic inlet and outlet effectively improved the flow rate and output backpressure without increasing the maximum output backpressure. The maximum flow rate of the pump system without load was increased by 36%. In addition, the elastic cavity height adversely affected the flow rate and output backpressure of the prototypes, but had no effect on the maximum output backpressure. In summary, the elastic inlet and outlet can effectively increase the output performance of the piezoelectric pump, but the design height should be appropriately reduced.

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“…PZTs are commonly used in a micropump [23,24,25]. A PZT pump is one kind of pump that manipulates fluid by mechanical deformation caused by a PZT actuator.…”

Section: Introductionmentioning

confidence: 99%

A Novel PZT Pump with Built-in Compliant Structures

Bao

Zhang

Tang

et al. 2019

Sensors

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Different to the traditionally defined valved piezoelectric (PZT) pump and valveless PZT pump, two groups of PZT pumps with built-in compliant structures—with distances between the free ends of 0.2 mm (Group A) and 0 mm (Group B)—were designed, fabricated, and experimentally tested. This type of pump mainly contains a chamber 12 mm in diameter and 1.1 mm in height, a PZT vibrator, and two pairs of compliant structures arranged on the flowing channel. The flow-resistance differences between these two groups of PZT pumps were theoretically and experimentally verified. The relationships between the amplitude, applied voltage and frequency of the PZT vibrators were obtained experimentally, with results illustrating that the amplitude linearly and positively correlates with the voltage, while nonlinearly and negatively correlating to the frequency. The flow rate performance of these two groups was experimentally tested from 110–160 Vpp and 10–130 Hz. Results showed that the flow rate positively correlates to the voltage, and the optimum flow rate frequency centers around 90 Hz for Group A and 80 Hz for Group B, respectively. The flow rate performances of Group B were further measured from 60–100 Hz and 170–210 Vpp, and obtained optimal flow rates of 3.6 mL/min at 210 Vpp and 80 Hz when ignoring the siphon-caused backward flow rate. As the compliant structures are not prominently limited by the channel’s size, and the pump can be minimized by Micro-electromechanical Systems (MEMS) processing methods, it is a suitable candidate for microfluidic applications like closed-loop cooling systems and drug delivery systems.

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A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure

Cited by 27 publications

References 8 publications

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Research on Inlet and Outlet Structure Optimization to Improve the Performance of Piezoelectric Pump

A Novel PZT Pump with Built-in Compliant Structures

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