2013
DOI: 10.1016/j.nima.2012.10.132
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A reflectometer for at-wavelength characterisation of gratings

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Cited by 8 publications
(1 citation statement)
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“…Fig. 11(a) displays the simulated grating efficiencies together with the corresponding at-wavelength measurements performed at the Optics Beamline at BESSY (Eggenstein et al, 2013). The REFLEC program (Scha ¨fers & Krumrey, 1996) was used to simulate the grating efficiencies.…”
Section: Optimizing Grating Efficienciesmentioning
confidence: 99%
“…Fig. 11(a) displays the simulated grating efficiencies together with the corresponding at-wavelength measurements performed at the Optics Beamline at BESSY (Eggenstein et al, 2013). The REFLEC program (Scha ¨fers & Krumrey, 1996) was used to simulate the grating efficiencies.…”
Section: Optimizing Grating Efficienciesmentioning
confidence: 99%