A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis

Gowini, Mohamed M. El; Moussa, Walied A.

doi:10.3390/s91209945

Cited by 12 publications

(2 citation statements)

References 28 publications

(43 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The problem of interest in this study is to model the full device response using a 3D model of a SAW sensor; therefore the finite element method is adopted. A thorough discussion of the FE formulation for solving the wave equations in a piezoelectric medium has been published elsewhere [ 30 ].…”

Section: Numerical Modeling Using Finite Element Analysis (Fea)mentioning

confidence: 99%

A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor

Gowini

Moussa

2010

Sensors

Self Cite

View full text Add to dashboard Cite

Hydrogen plays a significant role in various industrial applications, but careful handling and continuous monitoring are crucial since it is explosive when mixed with air. Surface Acoustic Wave (SAW) sensors provide desirable characteristics for hydrogen detection due to their small size, low fabrication cost, ease of integration and high sensitivity. In this paper a finite element model of a Surface Acoustic Wave sensor is developed using ANSYS12© and tested for hydrogen detection. The sensor consists of a YZ-lithium niobate substrate with interdigital electrodes (IDT) patterned on the surface. A thin palladium (Pd) film is added on the surface of the sensor due to its high affinity for hydrogen. With increased hydrogen absorption the palladium hydride structure undergoes a phase change due to the formation of the β-phase, which deteriorates the crystal structure. Therefore with increasing hydrogen concentration the stiffness and the density are significantly reduced. The values of the modulus of elasticity and the density at different hydrogen concentrations in palladium are utilized in the finite element model to determine the corresponding SAW sensor response. Results indicate that with increasing the hydrogen concentration the wave velocity decreases and the attenuation of the wave is reduced.

show abstract

Section: Numerical Modeling Using Finite Element Analysis (Fea)mentioning

confidence: 99%

A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor

Gowini

Moussa

2010

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…However, this model does not include the internal reflection of the IDT. The equivalent-circuit model can take the second order response of the device into account, and can get the whole impedance characteristic of the device [4]. In addition, the equivalent-circuit model can also calculate the mechanical wave reflection and the effect of energy storage.…”

Section: Introductionmentioning

confidence: 99%

Research on Propagation Characteristics of SAW Based on ANSYS

Wen

Xin

2013

AMR

View full text Add to dashboard Cite

In order to get the propagation characteristics of surface acoustic wave (SAW) along the piezoelectric crystals surface, the scheme of achieving the propagation characteristics of SAW device based on finite element analysis with ANSYS was proposed in this paper. In this scheme, the model of SAW device was built by the finite element analysis, and the parameter of the electrode and the substrate material was set. The geometry model of SAW device was meshed, and the continuous entity was divided into finite element model. The actual problems of boundary conditions and load in mechanical and electrical were applied to the model. By means of simulating a SAW device with center frequency at 100 MHz, the comparison and analysis between the simulation results and the theory results were presented. Experiments results confirm that the SAW energy is confined into a zone close to the piezoelectric crystals surface and is 1 to 2 wavelengths thick, and the amplitude and energy of the SAW will decrease rapidly with increasing depth.

show abstract

Robust mixed FE for analyses of higher-order electromechanical coupling in piezoelectric solids

Serrao,

Kozinov

2023

Comput Mech

View full text Add to dashboard Cite

Direct flexoelectricity is a size-dependent phenomenon, very prominent at smaller scales, that connects the strain gradients and the electric field. The very existence of strain gradients enhances noncentrosymmetry and heightens the interaction between piezoelectricity and flexoelectricity, demanding fully coupled higher-order electromechanical formulations. The numerical instability of the existing finite elements used to model flexoelectricity alone is revealed due to their reliance on the stabilization parameter. Thus, two new finite elements () and () are proposed for mixed FEM that are numerically robust without any need of such stabilization parameters. Additionally, the existing finite element [ in (Deng et al. in J Appl Mech 84:081004, 2017)], is implemented from scratch to replicate known results and benchmark the performance of newly proposed finite elements. To verify the robustness of these elements, various benchmark problems for flexoelectricity in dielectric solids, such as a thick cylinder and truncated pyramid are simulated. The great agreement of the numerical results with the existing ones reflects the foundational nature of the proposed elements. Furthermore, the proposed mixed finite elements were used to successfully analyze cantilever beam and truncated pyramid problems where piezoelectric effects were taken into account for the first time. Current results are intrumental in simulating flexoelectricity and piezoelectricity together to highlight their interactions using newly proposed numerically robust finite elements.

show abstract

A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis

Cited by 12 publications

References 28 publications

A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor

A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor

Research on Propagation Characteristics of SAW Based on ANSYS

Robust mixed FE for analyses of higher-order electromechanical coupling in piezoelectric solids

Contact Info

Product

Resources

About