A real-time terahertz imaging system consisting of terahertz quantum cascade laser and uncooled microbolometer array detector

Hosako, Iwao; Sekine, Norihiko; Oda, Naoki; Sano, Masahiko; Kurashina, Seiji; Miyoshi, Motosuke; Sonoda, Ken'ichi; Yoneyama, Hajime; Sasaki, Tokuhito

doi:10.1117/12.887947

Cited by 7 publications

(2 citation statements)

References 7 publications

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“…Aimed at this problem, some improvements have been made on microbridge structures and membrane materials. A double-layer structure is introduced in [ 19 ] to obtain high fill factor. A thin metamaterial film tuned to the illuminator frequency is integrated in [ 20 ].…”

Section: Introductionmentioning

confidence: 99%

Spiral Antenna-Coupled Microbridge Structures for THz Application

et al. 2017

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Bolometer sensor is a good candidate for THz imaging due to its compact system, low cost, and wideband operation. Based on infrared microbolometer structures, two kinds of antenna-coupled microbridge structures are proposed with different spiral antennas: spiral antenna on support layer and spiral antenna with extended legs. Aiming at applications in detection and imaging, simulations are carried out mainly for optimized absorption at 2.52 THz, which is the radiation frequency of far-infrared CO2 lasers. The effects of rotation angle, line width, and spacing of the spiral antenna on THz wave absorption of microbridge structures are discussed. Spiral antenna, with extended legs, is a good solution for high absorption rate at low absorption frequency and can be used as electrode lead simultaneously for simplified manufacturing process. A spiral antenna-coupled microbridge structure with an absorption rate of more than 75% at 2.52 THz is achieved by optimizing the structure parameters. This research demonstrates the use of different spiral antennas for enhanced and tunable THz absorption of microbridge structures and provides an effective way to fabricate THz microbolometer detectors with great potential in the application of real-time THz imaging.

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Section: Introductionmentioning

confidence: 99%

Spiral Antenna-Coupled Microbridge Structures for THz Application

et al. 2017

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“…Terahertz (THz) technology is very much expected to be applied to biomedical imaging [1], [2] , non-destructive inspection [3] , security [4], [5] and so forth, because biological macromolecules have spectral features in the THz frequency region, and THz radiation is transparent to papers, clothes, plastics, etc. Time Domain Spectroscopy (TDS) technique has been used in most of cases to investigate spectral features for a variety of materials and depth profiles of layered materials since early 2000 [6], [7] .…”

Section: Introductionmentioning

confidence: 99%

Proposal for real-time terahertz imaging system with palm-size terahertz camera and compact quantum cascade laser

Oda¹,

Lee

Ishi³

et al. 2012

SPIE Proceedings

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This paper describes a real-time terahertz (THz) imaging system, using the combination of a palm-size THz camera with a compact quantum cascade laser (QCL). The THz camera contains a 320x240 microbolometer focal plane array which has nearly flat spectral response over a frequency range of ca. 1.5 to 100 THz, and operates at 30 Hz frame rate.The QCL is installed in compact cryogen-free cooler. A variety of QCLs are prepared which can cover frequency range from ca. 1.5 to 5 THz. THz images of biochemical samples will be presented, using the combined imaging system. Performance of the imaging system, such as signal-to-noise ratio of transmission-type THz microscope, is predicted.

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Fabrication and parameters calculation of room temperature terahertz detector with micro-bridge structure

Wang

Gou

et al. 2014

J Infrared Milli Terahz Waves

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Room temperature terahertz (THz) detector indicates great potentials in imaging application because of real-time, compact bulk and unique spectral characteristics. Different dimension THz detectors based on micro-bridge structure were designed and simulated to get optimizing microbolometer parameters from the simulation results of membrane temperature changing and THz absorption. Those microbolometers were fabricated with complex semiconductor process and three dimension deformations of micro-bridges were obtained by laser scanning confocal microscope to identify the focal plane array micro-bridge design. The noise equivalent power of THz detector achieves 123 pW/Hz 1/2 and average response time of the detector is 6.7 ms, which is suitable for the application of active THz imaging.

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A real-time terahertz imaging system consisting of terahertz quantum cascade laser and uncooled microbolometer array detector

Cited by 7 publications

References 7 publications

Spiral Antenna-Coupled Microbridge Structures for THz Application

Spiral Antenna-Coupled Microbridge Structures for THz Application

Proposal for real-time terahertz imaging system with palm-size terahertz camera and compact quantum cascade laser

Fabrication and parameters calculation of room temperature terahertz detector with micro-bridge structure

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