Abstract:In semiconductor fabrication processes, real-time equipment monitoring and fault detection become critical as most problems reveal themselves first on the equipment performance and much later on the wafer quality. The sooner we can detect the problem, the lower the production loss. The goal of this paper is to present an integrated equipment monitoring approach for a PECVD tool. The approach will include: 1) simultaneous monitoring scheme: a dartboard display of real-time data that provides an easy reading of … Show more
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