A reactor scale gas dynamics model of an industrial multi-wafer atomic layer deposition reactor using direct simulation Monte Carlo approach

Thiruppathiraj, Sudharshanaraj

doi:10.26153/tsw/14558

2021

DOI: 10.26153/tsw/14558

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A reactor scale gas dynamics model of an industrial multi-wafer atomic layer deposition reactor using direct simulation Monte Carlo approach

Sudharshanaraj Thiruppathiraj¹

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A reactor scale gas dynamics model of an industrial multi-wafer atomic layer deposition reactor using direct simulation Monte Carlo approach

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