2016
DOI: 10.1117/12.2218806
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A random approach of test macro generation for early detection of hotspots

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“…Combined with the test pattern enumeration methodology, this method could catch some yield detractor patterns [48] . Test patterns are similar to the real self-aligned multiple patterning design, and simulations are conducted on them to identify hotspots [49,50] . These hotspots are used to consequently optimize the fabrication process and models.…”
Section: Hotspot Detection At An Early Stage Of New Technology Node Developmentmentioning
confidence: 99%
“…Combined with the test pattern enumeration methodology, this method could catch some yield detractor patterns [48] . Test patterns are similar to the real self-aligned multiple patterning design, and simulations are conducted on them to identify hotspots [49,50] . These hotspots are used to consequently optimize the fabrication process and models.…”
Section: Hotspot Detection At An Early Stage Of New Technology Node Developmentmentioning
confidence: 99%
“…Calibre® LSG [19] is a tool for the random generation of realistic design-like layouts, without design rule violations. The tool uses a Monte Carlo method to apply randomness in the generation of layout clips by inserting basic unit patterns in a grid.…”
Section: Calibre ® Lsgmentioning
confidence: 99%