2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) 2022
DOI: 10.1109/spawda56268.2022.10046022
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A Quasi-Zero Stiffness Clamping Mechanism for Micro Ultrasonic Motor

Tianlu Huang
1
,
Yu-Liang Mu
2
,
Ling-Feng Tang
3
et al.
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