A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability

Zhang, Quanwei; Li, Cun; Zhao, Yue; Zhang, Zichao

doi:10.1109/jsen.2021.3111310

Cited by 19 publications

(7 citation statements)

References 13 publications

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“…However, the relationship between resonance frequency and force is not usually linear, and thus has to be linearized to promise accuracy. Resonant force sensors feature high accuracies, high resolutions, strong anti-interference capabilities, long-term stabilities, and easy long-distance transmission [113]. However, many problems still exist in practical applications.…”

Section: Vision Micro-force Sensormentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

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Micro-force measurement with high resolution, accuracy, and reliability is of interest to a broad range of applications including gravitational wave detection, intelligent healthcare, bionic robot, and micromanipulation. Herein, the research development in recent years of micro-force sensors based on various principles is reviewed thoroughly, presenting the characteristics and applications, as well as summarizing their advantages and limitations. The indispensable component of force sensors, elastic sensitive elements, is underlined. Next, four kinds of not widely used but promising sensors are also introduced briefly. Finally, the traceable reference forces are analyzed, concluding with a future perspective into the corresponding challenges and opportunities of micro-force sensors for future research. This review aims at providing references for developing micro-force sensors and improving their performance.

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Section: Vision Micro-force Sensormentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

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“…The quartz crystal resonator (QCR) consists of a quartz substrate sandwiched between two electrodes. It is widely used as a sensor for measuring external parameters, such as pressure [ 1 , 2 ], mass [ 3 , 4 , 5 ], and humidity [ 6 , 7 , 8 ], due to its compact size, high frequency, stability, and good repeatability.…”

Section: Introductionmentioning

confidence: 99%

Study of Force-Frequency Characteristics in AT-Cut Strip Quartz Crystal Resonators with Different Rotation Angles

Yang

Huang

Tan

et al. 2023

Sensors

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This paper investigated the force-frequency characteristics of AT-cut strip quartz crystal resonator (QCR) employing finite element analysis methods and experiments. We used the finite element analysis software COMSOL Multiphysics to calculate the stress distribution and particle displacement of the QCR. Moreover, we analyzed the impact of these opposing forces on the frequency shift and strains of the QCR. Meanwhile, the resonant frequency shifts, conductance, and quality factor (Q value) of three AT-cut strip QCRs with rotation angles of 30°, 40°, and 50° under different force-applying positions were tested experimentally. The results showed that the frequency shifts of the QCRs were proportional to the magnitude of the force. The highest force sensitivity was QCR with a rotation angle of 30°, followed by 40°, and 50° was the lowest. And the distance of the force-applying position from the X-axis also affected the frequency shift, conductance, and Q value of the QCR. The results of this paper are instructive for understanding the force-frequency characteristics of strip QCRs with different rotation angles.

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“…Hernandez et al [10] designed three MEMS pressure sensors with quality factors of 87.65, 67.63, and 37.90 by using CMOS industrycompatible technology. Zhang et al [11] designed a quartz resonant ultra-high pressure sensor with high accuracy and stability. By optimizing the assembly process, the resonator was packaged in a stable vacuum chamber (<1 Pa).…”

Section: Introductionmentioning

confidence: 99%

Coupled chaotic vibration during pressure detection of micro-resonant pressure sensor

Fu,

Hou,

Shi

2023

Phys. Scr.

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In measuring gas pressure, the stiffness of the resonator in the micro-resonant pressure sensor changes. If the design parameters are not properly selected, there will be significant changes of vibration or even chaotic vibration in the process of gas pressure detection, which seriously affects the detection accuracy and the stability of the sensor. The micro-resonant pressure sensor is in an environment of deep coupling and mutual influence of multiple physical fields when detecting the external environmental pressure. In this work, a multi-field coupling nonlinear vibration model of the resonant sensor used in pressure detection is established, and the multi-field coupling bifurcation, chaos and other complex vibration characteristics of the sensor system are explored. The influence of the initial gap between the resonator and the base, the length of the resonator, and the excitation voltage on the vibration state during pressure detection are analyzed, and the stable vibration range of each influencing parameter is determined. The results show that when the sensor detects the pressure, the initial gap of the sensor, the length of the resonator, and the stability of the excitation voltage decrease, causing unstable vibration of the sensor. In order to obtain stable sensor detection performance, it is necessary to determine the stability range of sensor related parameters correctly.

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A Quartz Resonant Ultra-High Pressure Sensor With High Precision and High Stability

Cited by 19 publications

References 13 publications

Micro-force sensing techniques and traceable reference forces: a review

Micro-force sensing techniques and traceable reference forces: a review

Study of Force-Frequency Characteristics in AT-Cut Strip Quartz Crystal Resonators with Different Rotation Angles

Coupled chaotic vibration during pressure detection of micro-resonant pressure sensor

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