A PZT Actuated 6-DOF Positioning System for Space Optics Alignment

Chen, Fangxin; Dong, Wei; Yang, Miao; Sun, Lining; Du, Zhijiang

doi:10.1109/tmech.2019.2942645

Cited by 47 publications

(21 citation statements)

References 30 publications

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“…The experiment results showed that this mechanism performs well in straightness error and yaw motion error compared with other similar stages. Authors [129] guided the motion of the BAM via a long thin leaf flexure hinge in the 6-DOF positioning system design, as shown in Figure 10 (h). The guide mechanism successfully protects the BAM from influence of gravity.…”

Section: A Enhancement Of the Bam's Lateral Stiffnessmentioning

confidence: 99%

“…Load capacity is important for the FDAMs as it suffers complex loads. Authors [129] designed a space optics alignment used 6-DOF positioning system. Although gravity can be ignored in space, it brought troubles when the experiment was carried out on earth where the gravity applied to the actuator is beyond 30N.…”

Section: Load Capacity Of the Displacement Amplifiermentioning

confidence: 99%

“…Chen et al [124] introduced this definition to the multi-optimization design of an amplifier based linear actuation system. In [129], authors studied the load characteristic of the BAMs, where the external load is divided into elastic load which is from the reactive force of elastic elements, and the constant load which is the gravity of the system. Analysis results showed that the elastic load will influence the amplification ratio and the constant load will change the original point of the actuator.…”

Section: Load Capacity Of the Displacement Amplifiermentioning

confidence: 99%

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A Review on the Flexure-Based Displacement Amplification Mechanisms

et al. 2020

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Multifarious flexure-based displacement amplifiers have been proposed and studied in the past decades, showing importance in many industrial fields, such as bioengineering, optical instruments, and semiconductor technology. Displacement amplifiers provide precise motion and large stroke through a simple and low-cost way compared with other piezoelectric actuators. Those merits have opened a door for new and advanced micro devices with unprecedented performance. This paper aims to proffer a comprehensive review on the design, modeling, characteristics, and applications of flexure-based displacement amplifiers, following by pointing out the inherent drawbacks in this research area such as amplification ratio limit, parasitic motion, low lateral stiffness, low natural frequency, and discussing existing solutions and some potential research directions in those topics. Finally, a summary is concluded and the future development perspectives of the displacement amplifiers are discussed. This review contributes to giving a comprehensive understanding of the displacement amplifier, which provides guidance on designing new displacement amplifiers for improving their mechanical output performance. It is also expected to be instrumental for related researchers to understand displacement amplifiers, and to successfully select and design for specific applications.

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Section: A Enhancement Of the Bam's Lateral Stiffnessmentioning

confidence: 99%

Section: Load Capacity Of the Displacement Amplifiermentioning

confidence: 99%

Section: Load Capacity Of the Displacement Amplifiermentioning

confidence: 99%

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A Review on the Flexure-Based Displacement Amplification Mechanisms

et al. 2020

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“…Since the flexible hinge can realize the transmissions of motion, force and energy through the elastic deformation of its flexible unit and has the advantages of high transmission accuracy, no friction, no lubrication, no gap, etc. [10][11][12], for FTS and EVC, high-precision positioning mechanisms based on the flexure hinge are generally used to fabricate micro-structured surfaces with high surface shape accuracy and working frequency [13,14]. Therefore, high-precision positioning mechanism design is of great significance for processing micro-structured industrial components with proper functional performance.…”

Section: Introductionmentioning

confidence: 99%

Analytical Compliance Equations of Generalized Elliptical-Arc-Beam Spherical Flexure Hinges for 3D Elliptical Vibration-Assisted Cutting Mechanisms

Wang

Shao

2021

Materials

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Elliptical vibration-assisted cutting technology has been widely applied in complicated functional micro-structured surface texturing. Elliptical-arc-beam spherical flexure hinges have promising applications in the design of 3D elliptical vibration-assisted cutting mechanisms due to their high motion accuracy and large motion ranges. Analytical compliance matrix formulation of flexure hinges is the basis for achieving high-precision positioning performance of these mechanisms, but few studies focus on this topic. In this paper, analytical compliance equations of spatial elliptic-arc-beam spherical flexure hinges are derived, offering a convenient tool for analysis at early stages of mechanism design. The mechanical model of a generalized flexure hinge is firstly established based on Castigliano's Second Theorem. By introducing the eccentric angle as the integral variable, the compliance matrix of the elliptical-arc-beam spherical flexure hinge is formulated. Finite element analysis is carried out to verify the accuracy of the derived analytical compliance matrix. The compliance factors calculated by the analytical equations agree well with those solved in the finite element analysis for the maximum error; average relative error and relative standard deviation are 8.25%, 1.83% and 1.78%, respectively. This work lays the foundations for the design and modeling of 3D elliptical vibration-assisted cutting mechanisms based on elliptical-arc-beam spherical flexure hinges.

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“…With the development of the micro-nano field, it is difficult for the single degree of freedom platforms to meet the requirements of current precise operation. Therefore, the research of high-performance multi-degree of freedom precision positioning platforms has become the research focus in these years [22,23].…”

Section: Introductionmentioning

confidence: 99%

Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

Gan

Long

2021

Micromachines

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This paper presents a design of a 3DOF XYZ bi-directional motion platform based on Z-shaped flexure hinges. In the presented platform, bridge-type mechanisms and Z-shaped flexure hinges are adopted to amplify its output displacement. Bi-direction motion along the X-axis and Y-axis follows the famous differential moving principle DMP, and the bi-directional motion along the Z-axis is realized by using the reverse arrangement of the Z-shaped flexure hinges along the X-axis and Y-axis. Statics analysis of the proposed platform is carried out by the energy method, compliance matrix method, and force balance principle. Meanwhile, the Lagrange method is used to analyze the dynamics of the platform. A series of simulations are conducted to demonstrate the effectiveness of the proposed design. The simulation results show that the average displacements of the platform in the XYZ-axis are ±125.58 μm, ±126.37 μm and ±568.45 μm, respectively.

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A PZT Actuated 6-DOF Positioning System for Space Optics Alignment

Cited by 47 publications

References 30 publications

A Review on the Flexure-Based Displacement Amplification Mechanisms

A Review on the Flexure-Based Displacement Amplification Mechanisms

Analytical Compliance Equations of Generalized Elliptical-Arc-Beam Spherical Flexure Hinges for 3D Elliptical Vibration-Assisted Cutting Mechanisms

Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

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