A Preliminary Study of Surface Integrity and Wheel Wear in the Grinding of Multilayered Thin Film Structures

Abstract

This study aimed to investigate the effect of grinding conditions, including depth of cut and grinding direction, on the material removal and surface finish of multilayered thin film structures. It was found that the increase in depth of cut improved the material removal rate, but worsened the ground surface finish. The grinding perpendicular to the thin films caused less damage and produced better surface than that parallel to the films. The characteristics of wheel wear were also studied. Grit pull-out and micro-fracture should be attributed to the wheel wear.