Abstract:Various static electricity countermeasures are taken in clean rooms� for preventing the pollution caused by particle adhesions. For working out a countermeasure�it is important to give consideration to the generation mechanism�characteristics and electrical charge of charged particles. However������������������������������������������������������������������������������������������� rooms have been established. Moreover�monodisperse and multi-charged particles are important as test particles for the basic stud… Show more
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