A precision robotic system for 3-D Micro-Assembly

Abstract

A type of robotic system for 3-D precision Micro-assembly was described, which can be used to assemble the micro Inertial confinement fusion (ICF) target which was made up of two Half-hohlraum (diameter:800μm~1000μm, length:1mm) and a capsule (diameter:200μm~500μm).The system structure and composing were described, and the key technology was introduced too. A new kinds of piezoelectric micro-gripper was developed in this robotic system. The assembly experimental results verify the position accuracy of capsule in the hohlraum is less than 10 m.