A practical method for determining film thickness using X-ray absorption spectroscopy in total electron yield mode

Isomura, Noritake; Oh-ishi, Keiichiro; Takahashi, Naoko; Kosaka, Satoru

doi:10.1107/s1600577521009401

Cited by 3 publications

(1 citation statement)

References 30 publications

(33 reference statements)

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“…Further, capacitive sensors can be used, as recently demonstrated for the film thickness of lubricants in ball bearings 5 . Also, X-ray sensors should be mentioned which are commonly in use for surface analysis and widely applicable [6][7][8] but limited in penetration depth by the mean free electron path of the investigated solid material. In addition, they often require ultra-high vacuum and can only monitor small samples.…”

Section: Detection Methods For Functional Coatingsmentioning

confidence: 99%

In-line fluorescence detector for production control in robot-driven environments

Behrendt

Adolph

Lutz

et al. 2023

Optical Measurement Systems for Industrial Inspection XIII

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Fluorescence imaging is a powerful tool to detect the presence of processing agents, e.g., oils, lubricants, and organic coatings on metal surfaces. This imaging technique can be used in production e. g., to determine the oil coverage on sheet metal to assure the best forming results or for inspecting the cleanliness of components before further processing like gluing, welding, coating, etc. The presented sensor is an evolution of the existing fluorescence laser scanner (F-Scanner) system 1 and is optimized for measurement in motion. Adding this additional degree of freedom by mounting the scanner on a robot or gantry enables complete scans of large and complex shaped parts as well as selected areas that require special care, e.g., an increased level of cleanliness. The F-Scanner system has been improved in terms of footprint, weight, durability, and robustness. It can be operated with lightweight industrial robots and even cobots. In situations where ambient light makes fluorescence imaging challenging, a fast Fourier transform (FFT) based technique is used to ensure unperturbed measurements and high-contrast images. This work gives an overview of the advanced developments made and demonstrates the effect of FFT signal processing.

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Section: Detection Methods For Functional Coatingsmentioning

confidence: 99%

In-line fluorescence detector for production control in robot-driven environments

Behrendt

Adolph

Lutz

et al. 2023

Optical Measurement Systems for Industrial Inspection XIII

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Total electron yield (TEY) detection mode Cr K-edge XANES spectroscopy as a direct method to probe the composition of the surface of darkened chrome yellow (PbCr1-xSxO4) and potassium chromate paints

Monico

d’Acapito²,

Cotte

et al. 2023

Nuclear Instruments and Methods in Physics Research Section B:

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Digging deeper: Buried layers and interfaces studied by modified total electron yield and soft x-ray absorption spectroscopy

Kröger

Petraru

Hanff

et al. 2022

Applied Physics Letters

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We report on the soft x-ray absorption spectroscopy investigation of thin film capacitors using a modified total electron yield detection mode. This mode utilizes two ammeters instead of one as commonly employed in the classical total electron yield scheme to measure photocurrents of devices under soft x-ray irradiation. The advantage of this configuration over the surface sensitive classical total electron yield mode is that it can provide information from buried layers and interfaces up to a thickness equal to the penetration depth of soft x-rays. The method can be easily adapted to existing synchrotron end stations. We investigate dielectric capacitors with dissimilar electrodes to assess the feasibility of the modified total electron yield method. Furthermore, in operando soft x-ray absorption spectroscopy measurements are performed on ferroelectric capacitors under bias and using two ammeters. The experimental results are discussed in terms of the external and internal photoemission processes and their distribution in thin film capacitors under an external bias condition. The proposed detection method opens the way to perform electronic and chemical state analyses of the buried interfaces and layers in various devices like multiferroic tunnel junctions, memristive devices, etc., during operation under an applied bias.

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A practical method for determining film thickness using X-ray absorption spectroscopy in total electron yield mode

Cited by 3 publications

References 30 publications

In-line fluorescence detector for production control in robot-driven environments

In-line fluorescence detector for production control in robot-driven environments

Total electron yield (TEY) detection mode Cr K-edge XANES spectroscopy as a direct method to probe the composition of the surface of darkened chrome yellow (PbCr1-xSxO4) and potassium chromate paints

Digging deeper: Buried layers and interfaces studied by modified total electron yield and soft x-ray absorption spectroscopy

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