A porous SiC ammonia sensor

Novel semiconductor materials for the development of chemical sensors and biosensors: A review

“…Moreover, the aforementioned WBG materials have excellent reverse recovery characteristics, and for this reason they require less time and energy to return to the base line signal. In addition they are less susceptible to electromag- GaN [33][34][35][36][37][38][39][40][41][42] InN [43] AlN [44][45][46] SiC [47][48][49][50][51][52][53] Ion sensing…”

Influence of the anodic etching current density on the morphology of the porous SiC layer

“…Like in nanoporous Si, nanoporous SiC has properties not present in bulk, such as enhanced photoluminescence 1 and enhanced ability to sense certain chemicals. 2,3 Porous SiC can also be used in biosensors 4 and as a substrate for epitaxial growth of GaN to reduce defect density. 5 Research on porous SiC began as early as in 1992 by Shor et al, 6 but much about it remains unknown.…”

“…Furthermore, most studies have fabricated porous SiC using bulk crystalline SiC, while few studies have fabricated porous SiC from thin films. 2,3,[7][8][9][10][11][12][13][14] SiC thin films are easy to make and relatively inexpensive compared with bulk SiC, and we believe that thin films are suitable for most applications. In many applications, the SiC thin film may be amorphous rather than crystalline: for example, researchers have reported using amorphous SiC thin films to fabricate humidity sensors 2 and ammonia sensors.…”

Comparative study of porous amorphous a-Si1−xCx films and a-Si1−xCx membranes on structural and luminescence properties

“…SiC is also an attractive substrate for group III nitride-based optoelectronic devices such as blue light emitting diodes and diode lasers [4]. Because of its exemplary chemical and mechanical properties, SiC, in combination with Si, is finding wider applications in microelectromechanical systems (MEMS), sensors humidity and gases [5][6][7]. Furthermore, extensive work is under way to apply porous SiC in biomedical technology, such as protein dialysis and bone tissue engineering, and in fuel cell technology [8][9][10].…”