A polarization rule on atomic arrangements of graphite-like boron carbonitride

Shimoyama, Iwao; Baba, Yuji; Sekiguchi, Takuya

doi:10.1016/j.carbon.2013.11.066

Cited by 9 publications

(1 citation statement)

References 53 publications

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“…[4][5][6][7][8][9][10] In addition, since BCN films can be prepared in a wide composition range, they can be a good candidate for electronic and photonic devices, optical and optoelectronical applications, and for rechargeable lithium batteries. 11,12 Many different techniques were used to synthesise phases in the B-C-N ternary system, including chemical vapour deposition, 13,14 PACVD, 15,16 pulsed laser deposition, 17,18 ion beam deposition, 19 RF 3 and DC sputtering. 20,21 A thorough literature study shows that boron carbide and other possible phases in the ternary B-C-N system have not been yet investigated in detail in thin film form especially according to the relationships between chemical, microstructural and tribological properties.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and characterisation of thin films in the B–C–N triangle

Tavşanoğlu¹,

Jeandin²,

Addemir³

2016

Surface Engineering

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International audienceIn this study, about 400 nm thick BCN films with different compositions were grown by reactive DC magnetron sputtering of a B4C target by varying the N2/Ar proportion in the sputtering gas from 0 to 50%. The microstructures of the films were determined by FE-SEM. The chemical composition was determined by electron probe microanalyser (EPMA). The crystallinity of the films was studied by grazing incidence XRD analyses. FTIR was used to determine the chemical bonding structures. The elemental depth profiles of the films were obtained from SIMS measurements. Nanoindentation and wear tests were used to determine the mechanical and tribological properties. Hardness, elastic modulus and wear rates of BCN films were significantly decreased with the increase of nitrogen in the coating composition. The results demonstrated that thin films in the ternary triangle B–C–N with tailored properties can easily be deposited by reactive DC magnetron sputtering with varying N2 flow rates

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