A pneumatic air table realized by micro-EDM

Guénat, O.; Hirata, Toru; Akashi, Tomoyuki; Grétillat, M.-A.; Rooij, N. F. de

doi:10.1109/84.735345

Cited by 11 publications

(4 citation statements)

References 16 publications

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“…Among the possible approaches, the use of a rotating pin electrode is widely reported [5][6][7][8]. Discussions of the use of rotary disc electrodes in micro EDM can be found in [9].…”

Section: Introductionmentioning

confidence: 99%

Characteristics of Intrinsic Josephson Junctions in a Thin Stack on Bi-2223 Thin Films

Odagawa

Sakai

Adachi

et al. 1998

Jpn. J. Appl. Phys.

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Micro groove machining is an important task in the fabrication of microdevices. Modern microdevices need metal micromachining techniques such as electro-discharge machining (EDM) and lasers. Micro EDM is a versatile technique for machining electrically conductive materials to make components for microsystem technologies. However, it is generally considered a slow process, because the material removal rate (MRR) is relatively low compared to other machining processes. In this paper, we propose a method to increase the MRR. Foil is used as a tool electrode in the machining of micro grooves and micro slits in brass. We have achieved material removal rates as high as 0.002 mm 3 min −1 .

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“…Among the possible approaches, the use of a rotating pin electrode is widely reported [5][6][7][8]. Discussions of the use of rotary disc electrodes in micro EDM can be found in [9].…”

Section: Introductionmentioning

confidence: 99%

Characteristics of Intrinsic Josephson Junctions in a Thin Stack on Bi-2223 Thin Films

Odagawa

Sakai

Adachi

et al. 1998

Jpn. J. Appl. Phys.

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“…Velocity: Acceleration and deceleration during the motion of an object is the main problem observed in the velocity measurements [30] [31]. To estimate the velocity, we measure differential displacements of the object for several step periods and extract the constant slope region from the curve of the displacement according to the time data.…”

Section: Characterizationmentioning

confidence: 99%

Design, Fabrication, and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation

Fukuta

Chapuis

Mita

et al. 2006

J. Microelectromech. Syst.

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This paper reports the design, fabrication and control of arrayed microelectromechanical systems (MEMS)-based actuators for distributed micromanipulation by generation and control of an air-flow force field. The authors present an original design of pneumatic microactuator, improving reliability and durability of a distributed planar micromanipulator described in the previous study. The fabrication process is based on silicon-on-insulator (SOI) wafer and HF (hydroflouric acid) vapor release, which also significantly increases the production yield of the 560 microactuator array device of 35 35 mm 2 . Minimization of the electrostatic actuation pull-in voltage through suspension shaping fabrication was also studied, and successfully validated for electrical efficiency improvement. A distributed control method to achieve good conveyance performance and reduce motion control instability was investigated. An emulation approach was chosen to validate a decentralized control strategy on the distributed active surface in order to conduct a proof-of-concept of a future smart structure, integrating sensors, intelligence, and microactuators. Thus, a centralized/decentralized control flow, inspired by autonomous mobile robot principles, was applied. It was modeled and implemented using C-programming language. Experimental and characterization results validate the control method for feedback micromanipulation with good velocity and load capacity performance.[1605]

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“…The various types of EDM process, and the shapes that can be machined, are given in table 1 [4]. Among the possible approaches, the use of a rotating pin electrode is widely reported [5][6][7][8]. Discussions of the use of rotary disc electrodes in micro EDM can be found in [9].…”

Section: Introductionmentioning

confidence: 99%

A new technique using foil electrodes for the electro-discharge machining of micro grooves

Yeo

Murali

2002

J. Micromech. Microeng.

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A pneumatic air table realized by micro-EDM

Cited by 11 publications

References 16 publications

Characteristics of Intrinsic Josephson Junctions in a Thin Stack on Bi-2223 Thin Films

Characteristics of Intrinsic Josephson Junctions in a Thin Stack on Bi-2223 Thin Films

Design, Fabrication, and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation

A new technique using foil electrodes for the electro-discharge machining of micro grooves

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