A Pmut Integrated Microfluidic System for Volumetric Flow Rate Sensing

Roy, Kaustav; Kalyan, Kritank; Ashok, Anuj; Shastri, Vijayendra; Pratap, Rudra

doi:10.1109/transducers50396.2021.9495576

Cited by 9 publications

(3 citation statements)

References 21 publications

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“…MEMS finds applications in a broad range of areas, such as medical technology, [ 214 , 215 , 216 ] telecommunications, [ 217 ] consumer electronics, [ 218 ] and automotive systems. [ 219 ] Innovations like inertial measurement units [ 220 ] in smartphones, pressure sensors [ 221 ] in cars, micro‐mirrors [ 222 ] in projection systems, and MUTs [ 223 , 224 , 225 , 226 , 227 , 228 , 229 , 230 , 231 , 232 ] as fingerprint sensors/medical imaging systems all demonstrate the transformative power of MEMS technology.…”

Section: Progress In the Mof Applicationsmentioning

confidence: 99%

Advances and Applications of Metal‐Organic Frameworks (MOFs) in Emerging Technologies: A Comprehensive Review

Li,

Yadav,

Zhou

et al. 2023

Global Challenges

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Metal‐organic frameworks (MOFs) that are the wonder material of the 21st century consist of metal ions/clusters coordinated to organic ligands to form one‐ or more‐dimensional porous structures with unprecedented chemical and structural tunability, exceptional thermal stability, ultrahigh porosity, and a large surface area, making them an ideal candidate for numerous potential applications. In this work, the recent progress in the design and synthetic approaches of MOFs and explore their potential applications in the fields of gas storage and separation, catalysis, magnetism, drug delivery, chemical/biosensing, supercapacitors, rechargeable batteries and self‐powered wearable sensors based on piezoelectric and triboelectric nanogenerators are summarized. Lastly, this work identifies present challenges and outlines future opportunities in this field, which can provide valuable references.

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Section: Progress In the Mof Applicationsmentioning

confidence: 99%

Advances and Applications of Metal‐Organic Frameworks (MOFs) in Emerging Technologies: A Comprehensive Review

Li,

Yadav,

Zhou

et al. 2023

Global Challenges

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“…Given these properties, MUT devices feature a wide range of applications, not only limited to the biomedical field, but also including physical sensors for assessing fluid properties (e.g. viscosity, density, and flow velocity) [5]- [8], humidity sensors [9], eye tracking [10], particle manipulation [11], chemical and gas detection [12], structural health monitoring [13], [14] and airborne applications such as gesture recognition and haptic feedback [15].…”

Section: Introductionmentioning

confidence: 99%

PMUT and CMUT Devices for Biomedical Applications: A Review

Moisello,

Novaresi,

Sarkar

et al. 2024

IEEE Access

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Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

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“…The electromagnetic properties of light in conjunction with the penetrability of sound have made it possible to penetrate deeper and obtain information that is functional to the target thus probed. Pulsed LEDs and MUTs [24][25][26][27][28][29][30][31][32][33][34][35][36][37] have revolutionized the field further, thereby creating wearable photoacoustic devices. In this work, we have fabricated piezoelectric micromachined ultrasound transducers (PMUTs) using functional thin-film piezoelectric material and the nanofabrication tools and have demonstrated their use as a photoacoustic receiver.…”

Section: Introductionmentioning

confidence: 99%

A PMUT based photoacoustic system as a microfluidic concentration detector

Roy

Shastri

Kumar

et al. 2022

Photons Plus Ultrasound: Imaging and Sensing 2022

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We report on the development of a novel piezo-MEMS based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (~31) and its wide fractional bandwidth (~73%).

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A Pmut Integrated Microfluidic System for Volumetric Flow Rate Sensing

Cited by 9 publications

References 21 publications

Advances and Applications of Metal‐Organic Frameworks (MOFs) in Emerging Technologies: A Comprehensive Review

Advances and Applications of Metal‐Organic Frameworks (MOFs) in Emerging Technologies: A Comprehensive Review

PMUT and CMUT Devices for Biomedical Applications: A Review

A PMUT based photoacoustic system as a microfluidic concentration detector

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