A platform for micropositioning based on piezo legs

Juhas, L.; Vujanić, A.; Adamovic, N.; Nagy, Laszlo; Borovać, Branislav

doi:10.1016/s0957-4158(00)00059-3

Cited by 30 publications

(14 citation statements)

References 4 publications

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“…On the level of mobile microrobots, piezoceramic cantilevers are used as legs which move a robot on a suitable working plate to increase the working range [19][20][21]. These microrobots are intended to be used in microassembly tasks in which an increased workspace plays an important role.…”

Section: Discussionmentioning

confidence: 99%

Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation

Szufnarowski

Schneider

2011

Mechanism and Machine Theory

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Section: Discussionmentioning

confidence: 99%

Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation

Szufnarowski

Schneider

2011

Mechanism and Machine Theory

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“…Ultraprecision stage positioning and nano-measurement technology are two key points in the domain of nanotechnology. For an ultra-precision positioning stage to achieve nanometer accuracy, piezoelectric actuators are commonly used because they have nanometer resolution [1][2][3][4][5][6][7]. Recently, the development of a long-range ultra-precision positioning stage has been an important target in the field of nanometer science and technology.…”

Section: Introductionmentioning

confidence: 99%

A novel 5DOF thin coplanar nanometer-scale stage

Jywe

Jeng

Liu

et al. 2008

Precision Engineering

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“…Ultra-precision stage positioning and nano-measurement technology are two key points in the domain of nanotechnology. For an ultra-precision positioning stage to achieve nanometer accuracy, piezoelectric actuators are commonly used because they have nanometer resolution [1][2][3][4][5][6][7]. Recently, the development of a long-range ultra-precision positioning stage has been an important target in the field of nanometer science and technology.…”

Section: Introductionmentioning

confidence: 99%

Development of the Nano-Measuring Machine stage

Jywe

Jeng

Teng

et al. 2007

IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society

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In this paper, it was successfully developed a nanomeasuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-offreedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm x 20mm x lltm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor.

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A platform for micropositioning based on piezo legs

Cited by 30 publications

References 4 publications

Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation

Force control of a piezoelectric actuator based on a statistical system model and dynamic compensation

A novel 5DOF thin coplanar nanometer-scale stage

Development of the Nano-Measuring Machine stage

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