TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300213
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A Plastic W-Band MEMS Phase Shifter

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Cited by 4 publications
(7 citation statements)
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“…The maximum FOM was measured around 1018/dB at a frequency around 107.4 GHz. Its phase shift is larger than the one of designs [1,4,7,9,12,13]. It is important to note here that the maximum phase variation (4948) of the phase shifter appears as expected at a lower frequency of 97 GHz (as for the corresponding triple-ridge transmission-type phase shifter).…”
Section: B) Triple-ridge Reflective-type Phase Shiftermentioning
confidence: 64%
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“…The maximum FOM was measured around 1018/dB at a frequency around 107.4 GHz. Its phase shift is larger than the one of designs [1,4,7,9,12,13]. It is important to note here that the maximum phase variation (4948) of the phase shifter appears as expected at a lower frequency of 97 GHz (as for the corresponding triple-ridge transmission-type phase shifter).…”
Section: B) Triple-ridge Reflective-type Phase Shiftermentioning
confidence: 64%
“…Figure 17 shows the measured RF frequency response in terms of loss and reflection phase variation for a frequency band between 85 GHz and 110 GHz, which was evaluated using the same MEMS chip and sets of biasing states as in Fig. 14. The triple-ridge transmission-type phase shifter shows the lowest dissipated power at its nominal frequency and outperforms designs [4,9,12,13] in terms of FOM and minimum number of tuning elements. At this frequency, the output reflection phase varies between 08 and 3778 and the loss is always better than 3.74 dB.…”
Section: B) Triple-ridge Reflective-type Phase Shiftermentioning
confidence: 96%
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“…The two-cavity resonator experiences a shift in resonant frequency upon deforming the membranes. Figure 1b is a transmission line model for the tunable filter where the inductive metal planes are modeled as parallel inductive shunts of impedance, X, and the resonant cavities are modeled as transmission lines of electrical length h 1 and h 2, respectively (Sammoura and Lin 2007). In this 2-cavity design, h 1 equals h 2 and X 1 equals X 3 due to symmetry (d 1 = d 3 ).…”
Section: Introductionmentioning
confidence: 99%