1999
DOI: 10.1016/s0957-4158(99)00025-2
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A piezoelectrically driven wire feeding system for high performance wedge-wedge-bonding machines

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Cited by 23 publications
(1 citation statement)
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“…For past few decades, piezoelectric type micro/nano positioners have revolutionized nano scale trajectory tracking in industrial applications like Scanning Probe Microscopy [1], semiconductor fabrication [2], micro robotics [3] and adaptive optics [4][5]amongst many others. The inherent high resolution of displacement, high stiffness, large blocking force and quick response characteristics have enabled piezo based manipulators supplant the traditional positioning systems.…”
Section: Introductionmentioning
confidence: 99%
“…For past few decades, piezoelectric type micro/nano positioners have revolutionized nano scale trajectory tracking in industrial applications like Scanning Probe Microscopy [1], semiconductor fabrication [2], micro robotics [3] and adaptive optics [4][5]amongst many others. The inherent high resolution of displacement, high stiffness, large blocking force and quick response characteristics have enabled piezo based manipulators supplant the traditional positioning systems.…”
Section: Introductionmentioning
confidence: 99%