Simulation of Semiconductor Processes and Devices 1998 1998
DOI: 10.1007/978-3-7091-6827-1_78
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A Physically-Based Electron Mobility Model for Silicon Device Simulation

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Cited by 5 publications
(3 citation statements)
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“…The measured resistivity q was converted to carrier concentration n using n ¼ 1/eql with e the electron charge and l the electron mobility. The model of Kaiblinger-Grujin et al 21 was used to calculate the sulfur concentration-dependent mobility using the SIMS data to provide the atomic profiles.…”
Section: Methodsmentioning
confidence: 99%
“…The measured resistivity q was converted to carrier concentration n using n ¼ 1/eql with e the electron charge and l the electron mobility. The model of Kaiblinger-Grujin et al 21 was used to calculate the sulfur concentration-dependent mobility using the SIMS data to provide the atomic profiles.…”
Section: Methodsmentioning
confidence: 99%
“…However, the minority carrier mobility for electrons can differ from the assumed majority carrier mobility; e.g., in silicon, the electrons minority carrier mobility in ptype silicon is higher than the majority carrier mobility in n-type silicon of the same doping level at high doping levels. [61,62] Furthermore, the mobility in the simulations is considered isotropic due to the missing possibility of combining an anisotropic mobility model with the galvanomagnetic transport model in Sentaurus Device. [63] However, in reality the mobility in 4H-SiC parallel to the c-axis, i.e., in vertical direction, is higher by ≈20% percent than the mobility perpendicular to the c-axis, [18] i.e., the lateral mobility.…”
Section: Calibration and Model's Validitymentioning
confidence: 99%
“…This approach quantitatively predicts the main tendency of electrical characteristics of the examined devices. Formulation of mobility is an important factor for the strained Si devices [24][25], a strained-dependent mobility is implemented in our simulation. …”
Section: Device Structure and Simulationmentioning
confidence: 99%