A phase locking test solution for MEMS devices

Supon, Tareq Muhammad; Rashidzadeh, Rashid

doi:10.1109/ets.2017.7968236

Cited by 5 publications

(3 citation statements)

References 23 publications

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“…Delay-based test methods have been used extensively in microelectronics [ 58 , 59 , 60 ]. To the best of the authors’ knowledge, their application in capacitive MEMS BIST was originally carried out by Rashidzadeh et al, who utilised delay lines to measure time intervals which are a function of the capacitance of the DUT [ 61 , 62 , 63 , 64 , 65 , 66 ]. The test methods, described in this subsection, include the charge control method, phase-locked loop (PLL) method, phase locking method and the use of a Pierce oscillator.…”

Section: Delay-based Test Methodsmentioning

confidence: 99%

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Built-In Self-Test (BIST) Methods for MEMS: A Review

2020

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A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).

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Section: Delay-based Test Methodsmentioning

confidence: 99%

“…In this method, a phase-locking circuit is utilized to detect physical defects in a capacitive MEMS [ 63 ]. Small defects that change the capacitance by fFs are hard to detect, especially in the presence of PVT variations.…”

Section: Delay-based Test Methodsmentioning

confidence: 99%

Built-In Self-Test (BIST) Methods for MEMS: A Review

2020

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“…The crucial micro-electro-mechanical system (MEMS) frameworks risen in a long term of 1970s [1], [2] and charmed in making them has created ever since. Not in any respect like in un ordinary integrated circuits (ICs), MEMS make use of facts and texture from diverse areas of imperativeness (electrical, mechanical, warm, optical, and normal), making checking out in common, and integrated built-in self-test (BIST) for MEMS, plenty extra complex than for ICs [3]- [6].…”

Section: Introductionmentioning

confidence: 99%

Self-test and calibration methods for micro electro-mechanical systems

Ahmed

Al-Gayem²

2023

TELKOMNIKA

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For the testing of micro electro-mechanical systems, we propose a taxonomy of built-in self-testing methods. These solutions that are non-intrusive, cost-effective and are typically non-intrusive during the testing process are being actively sought after as the cost of micro-electro-mechanical systems (MEMS) testing can account for 50% of the total cost of the end product. The selection of testing methods is analyzed extensively, and a classification table for such methods is presented according to three performance metrics: ease of application, test application, usefulness. Performance table also provides a field test domain for the method. While built-in-self-test (BIST) methods do depend on the application at hand, utilizing the inherent multimodal sensing capability of most sensors could be a promising approach for effective built-in self-test.

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