A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

Qiao, Yan; Wu, Naiqi; Zhou, MengChu

doi:10.1109/tsm.2012.2222945

Cited by 75 publications

(33 citation statements)

References 33 publications

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“…The design phase approach of operation cycle process are needed to complete an code instruction as well as the precedence relationships to determine the operation cycle time duration of the cycle design phase [21,22,24,25]. It is a complex stage and longest phase by a significant amount of a cycle completion.…”

Section: Design Phase Of Operation Cyclementioning

confidence: 99%

Efficient Node Processor with Cycle State Capture Unit (CSCU) for Secure Intercommunication Module

Chouhan¹,

Ravi²

2013

IJCA

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An integrated node processor cycle based capture system assures secured serving requests for data. This work introduces a significant extension to the use of operation cycles for network protection. The main function of the operation cycle is to protect path segments and facilitate contiguous working flow. In this paper, the individual nodes have a unique cycle code pattern generated by respective node processor that is kept dynamic for both the node and host/server. A "search cycle code pattern" algorithm for fast iterative operation cycle analysis is also proposed.

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Section: Design Phase Of Operation Cyclementioning

confidence: 99%

Efficient Node Processor with Cycle State Capture Unit (CSCU) for Secure Intercommunication Module

Chouhan¹,

Ravi²

2013

IJCA

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“…Generally, most studies on scheduling cluster tools focus on finding the optimal cyclic schedules [1][2][3][4][5][6][7][8][9][10][11] when the cluster tools are operated in a steady state. A dualarmed cluster tool is often operated at a constant cycle by employing swap strategies.…”

Section: Introductionmentioning

confidence: 99%

Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan

Sakai

Nishi

2017

Advances in Mechanical Engineering

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Cluster tools are used for semiconductor wafer fabrication. A cluster tool consists of several loadlock modules, processing modules, and material handling armed robots to transfer wafers between loadlocks and processing modules. Most conventional scheduling methods consider a cyclic schedule to minimize makespan. We consider noncyclic scheduling of dual-armed cluster tools. In practice, it is important to minimize wafer residency time in processing modules to maintain the surface quality of wafers. In the noncyclic operations, the cluster tool causes deadlock which may lead to excessive loss in the wafer fabrication process. We propose an efficient deadlock-free scheduling method for the noncyclic scheduling problem of a dual-armed cluster tool to minimize the residency time and makespan. The proposed method is applied to a dual-armed cluster tool with a non-revisiting process and a revisiting process. Computational results demonstrate the effectiveness of the proposed method.

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“…27 Since a one-wafer cyclic schedule is easy to implement and control, this problem is further investigated and a modified swap strategy is proposed to obtain a onewafer periodical schedule. 30 It is shown that such a schedule can reach the lower bound of cycle time. The scheduling problem of dual-arm cluster tools with both wafer revisiting and residency time constraints is studied and effective techniques are proposed to find an optimal one-wafer cyclic schedule.…”

Section: Introductionmentioning

confidence: 99%

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

Liu

Yang

2016

Advances in Mechanical Engineering

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It is very difficult to schedule a single-arm cluster tool with wafer revisiting such that wafer residency time constraints are satisfied. This article conducts a study on this challenging problem for a single-arm cluster tool with atomic layer deposition process. With a so-called p-backward strategy being applied, a Petri net model is developed to describe the dynamic behavior of the system. Based on the model, the existence of a feasible schedule is analyzed, schedulability conditions are derived, and scheduling algorithms are presented if there is a schedule. A schedule is obtained by simply setting the robot waiting time if schedulable, and it is very computationally efficient. The obtained schedule is shown to be optimal. Illustrative examples are given to demonstrate the proposed approach.

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A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting

Cited by 75 publications

References 33 publications

Efficient Node Processor with Cycle State Capture Unit (CSCU) for Secure Intercommunication Module

Efficient Node Processor with Cycle State Capture Unit (CSCU) for Secure Intercommunication Module

Noncyclic scheduling of dual-armed cluster tools for minimization of wafer residency time and makespan

Petri net-based scheduling of time constrained single-arm cluster tools with wafer revisiting

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