A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator

Nakahara, Keiji; Yoshimura, K.; Okayama, Yoshiyuki; Miki, Norihisa

doi:10.1109/memsys.2011.5734617

Cited by 6 publications

(4 citation statements)

References 5 publications

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“…Following the numerical simulation, it can also be noted that the experimentally measured complex curves indeed take the form of ellipses (Figure 5(a)), which validates the proposed kinematic assumption made in equation (10). Having fitted an ellipse 17 to the complex points (dots in Figure 5(a)), the temporal frequency and phase (angle in the complex plane) can be estimated (equation ( 13)).…”

Section: Tempo-spatial Decomposition Of the Deforming Surfacesupporting

confidence: 70%

“…4 Assuming periodic swimming strokes, it is interesting to note that only time-irreversible strokes produce net propagation, while time-reversible strokes yield only back and forth reciprocations. 5 Traveling waves, being time irreversible are one of the most common low Reynolds number swimming [6][7][8] and pumping 9,10 mechanisms, both in nature and in man-made swimmers and pumps.…”

Section: Introductionmentioning

confidence: 99%

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Propulsion at low Reynolds numbers by multiple traveling waves

Setter

Bucher

Haber

2014

Proceedings of the Institution of Mechanical Engineers, Part C:

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Microorganisms or micro-robotic swimmers employ traveling waves as a common swimming mechanism involving time-irreversible deformations of their outer surface. Normally, the deforming surfaces constitute of multiple spatial waves, some standing and others propagating forward or backward. A unique technique is developed here to experimentally decompose a waving surface into its spatial wavelengths in each time instance by processing a sequence of photographs. This information is curve fitted to yield the phase velocity, frequency, and amplitudes of the propagating and receding waves of each component. The significance of the harmonic decomposition is demonstrated using an experimental macro-scale swimmer that utilizes small amplitude circumferential waves. A numerical image processing and curve-fitting procedure is shown and a theoretical model is also developed to account for the hydrodynamic effects of multiple wavelengths. The theoretical results fit well with the experimental data at low speeds, although the contribution of higher harmonics was small in experiment, but the higher harmonics are clearly visible and successfully identified. Still, the importance of the multiharmonics analysis for swimmers, which utilize traveling waves mechanisms, found both in nature and in man-made machines, was formulated and partially verified.

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Section: Tempo-spatial Decomposition Of the Deforming Surfacesupporting

confidence: 70%

Section: Introductionmentioning

confidence: 99%

Propulsion at low Reynolds numbers by multiple traveling waves

Setter

Bucher

Haber

2014

Proceedings of the Institution of Mechanical Engineers, Part C:

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“…Okayama et al proposed a wafer bonding process that is performed in a liquid in order to avoid encapsulation of air bubbles [19]. Matsumoto et al used this process to fabricate hydraulic displacement amplification mechanisms for piezo actuators and This mechanism was applied to tactile displays and micro pumps [20][21][22]. This approach, however, cannot form 3D structures because of the parylene deposition process and because the surface of the encapsulated liquid is typically flat.…”

Section: Fabrication Of Hemispherical Liquid Encapsulated Structures ...mentioning

confidence: 99%

Fabrication of hemispherical liquid encapsulated structures based on droplet molding

Ishizuka

Miki

2015

J. Micromech. Microeng.

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We have developed and demonstrated a method for forming spherical structures of a thin polydimethylsiloxane (PDMS) membrane encapsulating a liquid. Liquid encapsulation can enhance the performance of microelectromechanical systems (MEMS) devices by providing deformability and improved dielectric properties. Parylene deposition and wafer bonding are applied to encapsulate liquid into a MEMS device. In parylene deposition, a parylene membrane is directly formed onto a liquid droplet. However, since the parylene membrane is stiff, the membrane is fragile. Although wafer bonding can encapsulate liquid between two substrates, the surface of the fabricated structure is normally flat. We propose a new liquid encapsulation method by dispensing liquid droplets. At first, a 20 μl PDMS droplet is dispensed on ethylene glycol. A 70 μl glycerin droplet is dispensed into a PDMS casting solution layer. The droplet forms a layer on heated ethylene glycol. Glycerin and ethylene glycol are chosen for their high boiling points. Additionally, a glycerin droplet is dispensed on the layer and surrounded by a thin PDMS casting solution film. The film is baked for 1 h at 75 °C. As the result, a structure encapsulating a liquid in a flexible PDMS membrane is obtained. We investigate the effects of the volume, surface tension, and guide thickness on the shape of the formed structures. We also evaluated the effect of the structure diameter on miniaturization. The structure can be adapted for various functions by changing the encapsulated liquid. We fabricated a stiffness-tunable structure by dispensing a magnetorheoligical fluid droplet with a stiffness that can be changed by an external magnetic field. We also confirmed that the proposed structure can produce stiffness differences that are distinguishable by humans.

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“…The long and thin format of this micropump could be beneficial when it is attached to catheter-type devices. We previously proposed this concept and demonstrated pumping [33]. Theoretical analysis on this mechanism predicts that the flow rates depend on the ratio of the amplitude of the traveling waves to the channel height.…”

Section: Introductionmentioning

confidence: 99%

A peristaltic micropump using traveling waves on a polymer membrane

Nakahara¹,

Yamamoto²,

Okayama³

et al. 2013

J. Micromech. Microeng.

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We demonstrate a peristaltic micropump that utilizes traveling waves on polymer membranes to transport liquids. This micropump requires no valves and, more importantly, the traveling waves can be generated by a single actuator. These features enable the design of simple, compact devices. This micropump has a hydraulic displacement amplification mechanism (HDAM) that encapsulates an incompressible fluid with flexible polymer membranes made of polydimethyl siloxane. A microchannel is attached to the top side of the HDAM. We used a cantilever-type piezoelectric actuator to oscillate the flexible membrane at the bottom of the HDAM, while the top-side membrane drives the liquid in the channel. This format enables rectangular parallelepiped micropumps as compact as 36 mm long, 10 mm wide and several millimeters high, depending on the channel height. Experiments using the fabricated micropumps equipped with microchannels of various heights revealed that the flow rate was dependent on the ratio of the amplitude of the traveling waves to the height of the fluidic channel. The manufactured micropump could successfully generate a maximum flow rate of 1.5 ml min−1 at 180 mW.

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A peristaltic micropump using traveling waves of polymer membranes driven by a single actuator

Cited by 6 publications

References 5 publications

Propulsion at low Reynolds numbers by multiple traveling waves

Propulsion at low Reynolds numbers by multiple traveling waves

Fabrication of hemispherical liquid encapsulated structures based on droplet molding

A peristaltic micropump using traveling waves on a polymer membrane

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