A performance analytical model of automated material handling system for semiconductor wafer fabrication system

Zhang, J.; Qin, Wei; Wu, Lihui

doi:10.1080/00207543.2015.1047980

Cited by 16 publications

(4 citation statements)

References 35 publications

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“…However, this approach is available only for one kind of wafer fab and has some limitations, such as its fab capacity, product mix, and various layout configurations. Using a modified Markov chain model with shortcuts and blocking in the semiconductor wafer fabrication system [42], the performance of a closed-loop automated material handling system was analyzed and evaluated effectively. Although the results of this study are good, several academically challenging issues still need to be updated.…”

Section: Overviewmentioning

confidence: 99%

A Multidisciplinary Mechatronics Program: From Project-Based Learning to a Community-Based Approach on an Open Platform

Phan

Ngo

2020

Electronics

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To face contemporary problems, international engineers must be trained in advanced learning environments and with professional skills and knowledge. Sponsored by USAID (US Agency for International Development), the Build-IT (Building University-Industry Learning and Development through Innovation and Technology) program leverages the vast capabilities of the implementing partner from Arizona State University and plays a key role as an innovative pioneer in converging personalities from various fields. A well-educated engineer can contribute to the sustainable development of society. With the aim of building community-oriented education, an integrated strategy was proposed in which a problem-based learning method is investigated to apply technical knowledge. In accordance with this strategy, in our proposed method, students from Mechatronics Engineering first had to work together with other learners in the electronics, software, control automation, and mechanics fields, followed by the design of an open platform integrated multi-disciplinary approach. By collaborating with their peers in developing this hardware, students become better equipped with specialized knowledge. This process also allows students to feel confident in implementing their innovative thinking while still maintaining the core meaning of the instrument. One of the key benefits of this approach is that helping students overcome their problems concurrently enhances the engineer’s function in the community despite missing some specialized skill sets. Based on experimental works using this open framework, the present approach demonstrates that pupils in our program have sufficient ability to contribute to social achievements. Lastly, the feasible, low-cost, and visually educational instrument made by the participants showcases the value of such a multi-disciplinary approach.

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Section: Overviewmentioning

confidence: 99%

A Multidisciplinary Mechatronics Program: From Project-Based Learning to a Community-Based Approach on an Open Platform

Phan

Ngo

2020

Electronics

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“…The study employed approximation methods and a gradient search approach to determine the optimal buffer allocation. Zhang et al [58] modelled mould manufacturing using OQNs with finite buffers. Based on queuing theory approximations, the proposed methods effectively evaluate system performance and demonstrate feasibility for large-scale practical problems.…”

Section: Buffer Allocation Problemsmentioning

confidence: 99%

Optimisation of Buffer Allocations in Manufacturing Systems: A Study on Intra and Outbound Logistics Systems Using Finite Queueing Networks

Amjath,

Kerbache,

Smith

et al. 2023

Applied Sciences

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Optimal buffer allocations can significantly improve system throughput by managing variability and disruptions in manufacturing or service operations. Organisations can minimise waiting times and bottlenecks by strategically placing buffers along the flow path, leading to a smoother and more efficient production or service delivery process. Determining the optimal size of buffers poses a challenging dilemma, as it involves balancing the cost of buffer allocation, system throughput, and waiting times at each service station. This paper presents a framework that utilises finite queueing networks for performance analysis and optimisation of topologies, specifically focusing on buffer allocations. The proposed framework incorporates a finite closed queuing network to model the intra-logistics material transfer process and a finite open queueing network to model the outbound logistics process within a manufacturing setup. The generalised expansion method (GEM) is employed to calculate network performance measures of the system, considering the blocking phenomenon. Discrete event simulation (DES) models are constructed using simulation software, integrating optimisation configurations to determine optimal buffer allocations to maximise system throughput. The findings of this study have significant implications for decision-making processes and offer opportunities to enhance the efficiency of manufacturing systems. By leveraging the proposed framework, organisations can gain valuable insights into supply chain performance, identify potential bottlenecks, and optimise buffer allocations to achieve improved operational efficiency and overall system throughput.

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“…The simulation results showed that compared to the traditional rules, ADM had better performance in adapting to changing environments. Zhang et al proposed a modified Markov chain model (MMCM) to analyze the performance of a closedloop automated material handling system with shortcuts and blockings [13]. Zhou and Zhou proposed an impending deadlock detection model and used a graphic formulation with critical chains and shared nodes to effectively avoid impending deadlocks [14].…”

Section: Real-time Production Scheduling Problemmentioning

confidence: 99%

A Dynamic Dispatching Method for Large-Scale Interbay Material Handling Systems of Semiconductor FAB

et al. 2022

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Interbay Automated Material Handling Systems (AMHS) are widely adopted especially in Semiconductor Wafer Fabrication Systems (SWFS). The dispatching method plays a major role in the control of AMHS. This paper proposes an efficient multi-objective dynamic dispatching method which will dynamically adjust vehicle-load assignments according to the real-time situation of the system. A multi-objective cost function with variable weights is established, taking into account various performance indices (i.e., transport time, throughput, cycle time, vehicle utilization, movement, and waiting time), and the corresponding mathematical model is formulated. Then, in order to obtain the suitable weights according to the real-time condition, an advanced method is developed based on fuzzy theory. After that, a Hungarian algorithm is adopted to solve the model. Finally, simulations are conducted to validate the proposed method. The results demonstrate that it has better comprehensive performance compared to the previous dispatching methods.

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A performance analytical model of automated material handling system for semiconductor wafer fabrication system

Cited by 16 publications

References 35 publications

A Multidisciplinary Mechatronics Program: From Project-Based Learning to a Community-Based Approach on an Open Platform

A Multidisciplinary Mechatronics Program: From Project-Based Learning to a Community-Based Approach on an Open Platform

Optimisation of Buffer Allocations in Manufacturing Systems: A Study on Intra and Outbound Logistics Systems Using Finite Queueing Networks

A Dynamic Dispatching Method for Large-Scale Interbay Material Handling Systems of Semiconductor FAB

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