A percolation approach to ion beam induced modifications of organic resists

Davenas, J.; Xl, Xu; Khodr, C.; Treilleux, M.; Steffan, G.

doi:10.1016/0168-583x(85)90423-9

Cited by 22 publications

(2 citation statements)

References 5 publications

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“…They suggest that a large amount of gas release could lead to the formation of internal bubbles and bulges. Davenas et al8 developed a model from percolation theory to interpret the initial stage of poly(methyl methacrylate) (PMMA) degradation upon irradiation with ion beams. According to their model, the gaseous molecules are evolved from the percolation of cylindrical tubes, and the partial pressure of the gas will reach its maximum when the tubes, on the average, just touch each other.…”

Section: Introductionmentioning

confidence: 99%

Dynamic evolution of gases in the γ‐ and helium‐ion radiolyses of solid polymers

Chang

LaVerne

2001

J Polym Sci B Polym Phys

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The dynamic evolution of gaseous hydrogen, methane, and carbon dioxide in the ␥and 4 He-ion radiolyses of solid polymers was investigated. The polymers used include low-density and high-density polyethylene, polypropylene, polystyrene, poly-(methyl methacrylate), Nylon 11, Nylon 6, and poly(dimer acid-co-alkyl polyamine). An inline quadrupole mass spectrometer was utilized to monitor the dynamic profiles of the gases produced in the radiolysis. One-and two-dimensional numerical diffusion models were developed to simulate and extract optimum diffusion coefficients and gas yields from the experimental dynamic gas profiles. It was found that the dynamic evolution of molecular hydrogen from the bulk polymer is controlled by its diffusion in most cases, such as CO 2 in poly(methyl methacrylate). In the ␥ radiolysis of some polymers such as low-density polyethylene and polypropylene, the dynamic evolution of methane is only partially controlled by the diffusion process, and some other postirradiation process is a factor. It is concluded that the simulation method developed in this article is helpful in understanding and predicting the mechanisms of gas evolution in the radiolysis of solid polymers.

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Section: Introductionmentioning

confidence: 99%

Dynamic evolution of gases in the γ‐ and helium‐ion radiolyses of solid polymers

Chang

LaVerne

2001

J Polym Sci B Polym Phys

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“…Auf diese Weise kann man PMMA als positiven Photolack verwenden [47]. Davenas beschrieb die Wandlung von PMMA von einem positiven Photolack (löslich) in einen negativen Photolack (nicht löslich) durch einen hohen Fluenzeintrag [16]. Anstatt eines Elektronenstrahls kann zur Belichtung des PMMA-Photolacks auch ultraviolette Strahlung verwendet werden [38].…”

Section: Modifizierung Durch Uv-bestrahlung Der Schichtenunclassified

Charakterisierung und Modifizierung glatter laserdeponierter Poly(methyl methacrylat)-Schichten

Fuchs¹

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Ion irradiation of poly(methyl methacrylate) for precise control of electrical and optical properties

Schoch

1994

J Polym Sci B Polym Phys

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Ion irradiation with Xe+ has been utilized to produce electrical conductivity in PMMA, as measured using a four‐point in‐line probe. Incident ion beam energy and current density have been varied to investigate their effect on electrical conductivity and optical absorbance of the samples after irradiation. Results support the premise that selection of beam parameters that maximize the ratio of energy transfer‐producing displacements to energy transfer‐producing ionization maximizes the ratio of induced conductivity to induced absorbance in the irradiated samples. Conductivity versus ion dose has also been shown to be well estimated using a damage trial model. © 1994 John Wiley & Sons, Inc.

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A percolation approach to ion beam induced modifications of organic resists

Cited by 22 publications

References 5 publications

Dynamic evolution of gases in the γ‐ and helium‐ion radiolyses of solid polymers

Dynamic evolution of gases in the γ‐ and helium‐ion radiolyses of solid polymers

Charakterisierung und Modifizierung glatter laserdeponierter Poly(methyl methacrylat)-Schichten

Ion irradiation of poly(methyl methacrylate) for precise control of electrical and optical properties

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