A Numerical Study on Crystal Defects in Elliptical Vibration Cutting of Single-Crystal Silicon by Molecular Dynamics Simulation

Liu, Changlin; To, Suet; Sheng, Xuexiang; Xu, Jianfeng

doi:10.2139/ssrn.4223558

2022

DOI: 10.2139/ssrn.4223558

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A Numerical Study on Crystal Defects in Elliptical Vibration Cutting of Single-Crystal Silicon by Molecular Dynamics Simulation

Changlin Liu

Suet To

Xuexiang Sheng³

et al.

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A Numerical Study on Crystal Defects in Elliptical Vibration Cutting of Single-Crystal Silicon by Molecular Dynamics Simulation

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