A Novel Wireless Energy Saving and Reliable Angular Accelerometer on Engineering Polyimide with Xenon Gas Filled in Chamber

Abstract

Four novel ideas are proposed in this paper to integrate an active RFID tag with thermal convection angular accelerometer on an engineering plastic substrate, thus the device is a wireless sensor. The first innovative idea is that this device is without any movable parts, so it is very reliable. The second new idea is that it is made on an engineering plastic substrate, such as polyimide, the thermal conductivity is much lower than silicon, so it can save more power and very useful for mobile operation. The third new idea is that the xenon gas is applied in the chamber for heat convection instead of CO2 used in the traditional thermal convection accelerometer. Carbon dioxide can produce oxidation effect to the heater and thermal sensors, while the inert gas xenon will not. The fourth new idea is the most powerful one to integrate with an active RFID tag on the same substrate, thus it is very useful for mobile operation, and is very easy for usage and fabrication. If one considers sensitivity as the first priority, then choose the floating structure (233°C/(rad/s2)). On the other hand, if the response speed is the requirement, then the non-floating structure is better (70μs).